Heater power feeding mechanism

Abstract

A heater power feeding mechanism for independently controlling temperatures of zones of a stage on which a substrate is placed. The respective zones of the stage include heaters. The heater power feeding mechanism includes a plurality of heater terminals configured to be connected to the heaters, a plurality of heater wires connected to the heater terminals, and an offset structure that offsets the heater wires from each other. The heater terminals are disposed on the periphery of a holding plate for holding the stage.

1 . A heater power feeding mechanism for independently controlling temperatures of zones of a stage on which a substrate is placed, the respective zones of the stage including heaters, the heater power feeding mechanism comprising:
 a plurality of heater terminals configured to be connected to the heaters;   a plurality of heater wires connected to the heater terminals; and   an offset structure that offsets the heater wires from each other,   wherein the heater terminals are disposed on a periphery of a holding plate for holding the stage.   
     
     
         2 . The heater power feeding mechanism as claimed in  claim 1 , further comprising:
 a bundling part that bundles the heater wires offset by the offset structure; and   a connector connected to the heater wires bundled by the bundling part.   
     
     
         3 . The heater power feeding mechanism as claimed in  claim 1 , wherein the offset structure, a predetermined number of the heater terminals, and a predetermined number of the heater wires constitute an assembly that is preassembled and attached to the holding plate. 
     
     
         4 . The heater power feeding mechanism as claimed in  claim 1 , wherein the offset structure, a predetermined number of terminals including an electrode terminal and the heater terminals, and a predetermined number of wires including a direct current wire and the heater wires constitute an assembly that is preassembled and attached to the holding plate. 
     
     
         5 . The heater power feeding mechanism as claimed in  claim 1 , wherein the stage includes an electrostatic chuck and the heaters are disposed in the electrostatic chuck. 
     
     
         6 . The heater power feeding mechanism as claimed in  claim 1 , wherein the periphery of the holding plate on which the heater terminals are disposed corresponds to an area of the stage where the substrate is not placed. 
     
     
         7 . The heater power feeding mechanism as claimed in  claim 1 , wherein the holding plate is made of an insulating material.