Ultrasonic transducer element chip, probe, electronic instrument, and ultrasonic diagnostic device

Abstract

An ultrasonic transducer element chip includes a substrate, a plurality of ultrasonic transducer elements and a plate-shaped member. The substrate includes a partition wall section defining a plurality of openings arranged in an array pattern. A wall thickness of the partition wall section is smaller than a wall height of partition wall section. Each of the ultrasonic transducer elements is provided in each of the openings. The plate-shaped member is fixed on a surface of the substrate opposite to a surface of the substrate on which the ultrasonic transducer elements are provided. The plate-shaped member covers at least one of the openings in a plan view seen along a thickness direction of the substrate.

What is claimed is: 
     
         1 . An ultrasonic transducer element chip comprising:
 a substrate including a partition wall section defining a plurality of openings arranged in an array pattern, a wall thickness of the partition wall section being smaller than a wall height of partition wall section;   a plurality of ultrasonic transducer elements with each of the ultrasonic transducer elements being provided in each of the openings; and   a plate-shaped member fixed on a surface of the substrate opposite to a surface of the substrate on which the ultrasonic transducer elements are provided, the plate-shaped member covering at least one of the openings in a plan view seen along a thickness direction of the substrate.