Tunable sensing device

Abstract

A tunable sensing device includes a substrate, a deformable dielectric unit and a tunable member. The dielectric unit is disposed on the substrate and is formed with a receiving space. The tunable member is received in the receiving space and has a stiffness tunable by an external electric field or an external magnetic field.

What is claimed is: 
     
         1 . A tunable sensing device, comprising:
 a substrate;   a deformable dielectric unit that is disposed on said substrate, and that is formed with a receiving space; and   a tunable member that is received in said receiving space, and that has a stiffness tunable by an external electric field or an external magnetic field.   
     
     
         2 . The tunable sensing device as claimed in  claim 1 , further comprising an electrode unit that includes a first electrode and a second electrode, which are disposed in said dielectric unit, and are respectively disposed at two opposite sides of said tunable member. 
     
     
         3 . The tunable sensing device as claimed in  claim 2 , wherein said tunable member includes an insulating fluid and a plurality of particles dispersed in said insulating fluid. 
     
     
         4 . The tunable sensing device as claimed in  claim 3 , wherein said particles of said tunable member are dielectric particles that are capable of aligning along the external electric field for increasing said stiffness of said tunable member. 
     
     
         5 . The tunable sensing device as claimed in  claim 3 , wherein said particles of said tunable member are magnetic particles that are capable of aligning along the external magnetic field for increasing said stiffness of said tunable member. 
     
     
         6 . The tunable sensing device as claimed in  claim 2 , wherein said tunable member is an electrorheological fluid. 
     
     
         7 . The tunable sensing device as claimed in  claim 2 , wherein said tunable member is a magnetorheological fluid. 
     
     
         8 . The tunable sensing device as claimed in  claim 2 , wherein said tunable member is an electroactive polymer. 
     
     
         9 . The tunable sensing device as claimed in  claim 2 , wherein a maximum capacitance value measured between said first and second electrodes when said tunable member is applied with the external electric field or the external magnetic field is larger than a maximum capacitance value measured between said first and second electrodes when said tunable member is not applied with the external electric field or the external magnetic field. 
     
     
         10 . The tunable sensing device as claimed in  claim 2 , wherein a maximum capacitance value measured between said first and second electrodes when said tunable member is applied with the external electric field or the external magnetic field is different from a maximum capacitance value measured between said first and second electrodes when said tunable member is not applied with the external electric field or the external magnetic field. 
     
     
         11 . The tunable sensing device as claimed in  claim 2 , wherein:
 said dielectric unit has a bottom portion disposed on said substrate, a side portion extending from a periphery of said bottom portion away from said substrate, and a top portion connected to said side portion and opposite to said bottom portion;   said bottom portion, said side portion and said top portion cooperatively define said receiving space; and   said first electrode is disposed in said top portion and said second electrode is disposed in said bottom portion.   
     
     
         12 . The tunable sensing device as claimed in  claim 11 , wherein said dielectric unit further has at least one through hole penetrating through said top portion, and being in spatial communication with said receiving space, and said dielectric unit includes a covering layer disposed on said top portion and covering said at least one through hole. 
     
     
         13 . The tunable sensing device as claimed in  claim 12 , wherein said top portion of said dielectric unit is formed with a recess in which said second electrode is disposed. 
     
     
         14 . The tunable sensing device as claimed in  claim 12 , wherein said covering layer is made of a material selected from the group consisting of parylene C, parylene D, parylene N, silicon dioxide, silicon nitride, polyimide, metal, and combinations thereof.