Laser machining method

Abstract

Laser machining method, including: liquid supplying into rectifying chamber; rectifying chamber attenuating disturbances in flow of liquid supplied; liquid injecting into liquid oscillating chamber exclusively from one direction from liquid inlet port arranged on only one portion of sidewall of liquid oscillating chamber; liquid jetting as jet liquid column into air from nozzle; laser beam focusing on axis of nozzle and guiding to machining point by jet liquid column; surface wave of jet liquid column generating and gradually increasing in amplitude in direction away from nozzle; a body of jet liquid column atomizing when jet liquid column strikes workpiece on machining point. Liquid flows from oscillating chamber inlet path for guiding liquid from rectifying chamber to oscillating chamber inlet port, oscillating chamber inlet path guiding liquid along window from one direction of liquid oscillating chamber to oscillating chamber inlet port.

What is claimed is: 
     
         1 . A laser machining method, comprising:
 a liquid supplying into a rectifying chamber;   the rectifying chamber attenuating disturbances in flow of the liquid supplied;   a liquid injecting into a liquid oscillating chamber exclusively from one direction from a liquid inlet port arranged on only one portion of a sidewall of the liquid oscillating chamber;   the liquid jetting as a jet liquid column into air from a nozzle;   a laser beam focusing on the axis of the nozzle and guiding to a machining point by the jet liquid column;   a surface wave of the jet liquid column generating and gradually increasing in amplitude in the direction away from the nozzle and   a body of the jet liquid column atomizing when the jet liquid column strikes the workpiece on the machining point,   wherein the liquid flows from an oscillating chamber inlet path for guiding the liquid from the rectifying chamber to the oscillating chamber inlet port, the oscillating chamber inlet path guiding the liquid along the window from one direction of the liquid oscillating chamber to the oscillating chamber inlet port.   
     
     
         2 . The laser machining method according to  claim 1 , wherein the liquid flows into the oscillating chamber along the window. 
     
     
         3 . The laser machining method according to  claim 1 , wherein a focusing optical system focuses the laser beam toward the window with respect to the nozzle inlet opening for causing a portion of the laser beam to strike a flow contracting portion at which the jet liquid column is formed and further increasing the surface wave on the outer surface of the jet liquid column. 
     
     
         4 . The laser machining method according to  claim 1 , further comprising:
 a mist jet inject on a workpiece surface to remove residues generated by machining.