US2017081766A1PendingUtilityA1

Method for no-silane electroless metal deposition using high adhesive catalyst and product therefrom

Assignee: NAT UNIV TSING HUAPriority: Sep 21, 2015Filed: Sep 20, 2016Published: Mar 23, 2017
Est. expirySep 21, 2035(~9.1 yrs left)· nominal 20-yr term from priority
C23C 18/1639C23C 18/1662C23C 18/38C23C 18/40C23C 18/1886C23C 18/1851C23C 18/1653C23C 18/2006C23C 18/1844C23C 18/1803C23C 18/1893C23C 18/34C23C 18/2086C23C 18/30C23C 18/32
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Claims

Abstract

A method for electroless metal deposition includes steps as follows. a) a substrate is provided, and the substrate has a surface which is subjected to a hydroxide surface modification to form a hydrophilic chemical oxide layer; b) a catalyst layer is formed on the chemical oxide layer, the catalyst layer includes a plurality of colloidal nanoparticles, and each of the plurality of colloidal nanoparticles includes a palladium nanoparticle and a high molecular polymer which wraps the palladium nanoparticle; and c) an electroless metal deposition is conducted, and a metal is deposited on the catalyst layer to form an electroless metal layer. An electroless metal layer included substrate is also provided.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A method for electroless metal deposition, comprising:
 a) providing a substrate, and the substrate having a surface which is subjected to a hydroxide surface modification to form a hydrophilic chemical oxide layer;   b) forming a catalyst layer on the chemical oxide layer, the catalyst layer including a plurality of colloidal nanoparticles, and each of the plurality of colloidal nanoparticles including a palladium nanoparticle and a high molecular polymer which wraps the palladium nanoparticle; and   c) conducting an electroless metal deposition, and a metal being deposited on the catalyst layer to form an electroless metal layer.   
     
     
         2 . The method for electroless metal deposition as claimed in  claim 1 , wherein in the step a, the hydroxide surface modification includes a sulfuric peroxide mixture method, an ozonation method, a hydrogen plasma method, or a nitric acid method. 
     
     
         3 . The method for electroless metal deposition as claimed in  claim 1 , wherein the step b further comprising using a protective agent and a precursor to form the catalyst layer on the chemical oxide layer, and the protective agent and the precursor have a weight ratio of 1:1. 
     
     
         4 . The method for electroless metal deposition as claimed in  claim 3 , wherein the protective agent is the high molecular polymer, and the precursor is a palladium ion. 
     
     
         5 . The method for electroless metal deposition as claimed in  claim 1 , wherein each of the plurality of colloidal nanoparticles has a particle size ranging from 6 nm to 10 nm. 
     
     
         6 . The method for electroless metal deposition as claimed in  claim 1 , wherein the high molecular polymer wrapping the palladium nanoparticle is a polyvinyl alcohol polymer, a polyvinyl alcohol acid polymer, a poly(vinyl alcohol-co-ethylene) polymer, or a poly(vinyl butyral-co-vinyl alcohol-co-vinyl acetate) polymer. 
     
     
         7 . The method for electroless metal deposition as claimed in  claim 1 , wherein the high molecular polymer is a low-degree-polymerization polyvinyl alcohol polymer with its molecular weight ranging from 20000 to 30000. 
     
     
         8 . The method for electroless metal deposition as claimed in  claim 1 , wherein in the step c, during the electroless metal deposition, the metal being deposited on the catalyst layer is nickel or copper. 
     
     
         9 . The method for electroless metal deposition as claimed in  claim 1 , wherein the colloidal nanoparticles is formed by reacting a precursor, a protective agent, and a reducing agent in an alkaline environment. 
     
     
         10 . The method for electroless metal deposition as claimed in  claim 9 , wherein the precursor is a palladium ion, the protective agent is the high molecular polymer, and the reducing agent is a formaldehyde solution. 
     
     
         11 . The method for electroless metal deposition as claimed in  claim 9 , wherein the precursor is at least one palladium nanoparticle, the protective agent is at least one high molecular polymer, and the at least one high molecular polymer wraps the at least one palladium nanoparticle to form at least one colloidal nanoparticle. 
     
     
         12 . The method for electroless metal deposition as claimed in  claim 11 , wherein the at least one high molecular polymer wrapping the at least one palladium nanoparticle is a polyvinyl alcohol polymer, a polyvinyl alcohol acid polymer, a poly(vinyl alcohol-co-ethylene) polymer, or a poly(vinyl butyral-co-vinyl alcohol-co-vinyl acetate) polymer. 
     
     
         13 . A method for metal deposition, comprising:
 a) providing a substrate, and the substrate having a surface which is subjected to a hydroxide surface modification to form a hydrophilic chemical oxide layer;   b) forming a catalyst layer on the chemical oxide layer, the catalyst layer including a plurality of colloidal nanoparticles, and each of the plurality of colloidal nanoparticles including a palladium nanoparticle and a high molecular polymer which wraps the palladium nanoparticle; and   c) conducting an electroless metal deposition to form a metal layer on the catalyst layer.   
     
     
         14 . The method of  claim 13 , further comprising d) conducting an electro-plating to increase the thickness of the metal layer. 
     
     
         15 . The method of  claim 13 , wherein the step b further comprising using the high molecular polymer and a palladium ion to form the catalyst layer on the chemical oxide layer. 
     
     
         16 . An electroless metal layer included substrate, comprising:
 a chemical oxide layer formed by conducting a hydroxide surface modification on a surface of a substrate;   a catalyst layer located on the chemical oxide layer, and the catalyst layer including a plurality of colloidal nanoparticles, and each of the plurality of colloidal nanoparticles including a palladium nanoparticle and a high molecular polymer which wraps the palladium nanoparticle; and   an electroless metal layer formed by conducting an electroless metal deposition to deposit a metal on the catalyst layer.   
     
     
         17 . The electroless metal layer included substrate as claimed in  claim 16 , wherein each of the plurality of colloidal nanoparticles has a particle size ranging from 6 nm to 10 nm. 
     
     
         18 . The electroless metal layer included substrate as claimed in  claim 16 , wherein the high molecular polymer wrapping the palladium nanoparticle includes a polyvinyl alcohol polymer, a polyvinyl alcohol acid polymer, a poly(vinyl alcohol-co-ethylene) polymer, or a poly(vinyl butyral-co-vinyl alcohol-co-vinyl acetate) polymer. 
     
     
         19 . The electroless metal layer included substrate as claimed in  claim 16 , wherein the high molecular polymer is a low-degree-polymerization polyvinyl alcohol polymer with its molecular weight ranging from 20000 to 30000. 
     
     
         20 . The electroless metal layer included substrate as claimed in  claim 16 , wherein the metal includes nickel or copper.

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