Abrasive pad and glass substrate abrading method

Abstract

Problem: To provide an abrasive pad and abrading method using same that are capable of extending the life of the abrasive pad when applied to abrading the surface of glass substrates, and that can ensure abrading capability that is appropriate for abrading the surface of glass substrates. Resolution Means: An abrasive pad used for abrading the surface of a glass substrate, that includes a base material layer, and an abrasive layer provided on one side of the base material layer, the abrasive layer including a plurality of pillar shaped abrading portions arranged separated from each other on the base material layer, the abrading portions being made from abrasive material that includes polishing abrasive particles, a filler, and a binder resin, the polishing abrasive particles including abrasive particles and a glass matrix, and the filler including a first filler that fractures or drops out when the surface is being abraded, forming approximately spherical crown shaped recesses in the top face of the abrading portions.

1 . An abrasive pad used for abrading the surface of a glass substrate, comprising:
 a base material layer; and an abrasive layer provided on one side of the base material layer,   the abrasive layer including a plurality of pillar shaped abrading portions arranged separated from each other on the base material layer,   the abrading portions being made from abrasive material that includes polishing abrasive particles, a filler, and a binder resin,   the polishing abrasive particles including abrasive particles and a glass matrix, and   the filler including a first filler that fractures or drops out when the surface is being abraded, forming substantially spherical crown shaped recesses in the top face of the abrading portions.   
     
     
         2 . The abrasive pad according to  claim 1 , wherein the first filler includes glass balloons with an average particle size of 40 μm or larger. 
     
     
         3 . The abrasive pad according to  claim 1 , wherein the first filler includes glass beads with an average particle size of 10 μm or larger. 
     
     
         4 . The abrasive pad according to  claim 1 , wherein the filler includes a second filler made from a silicate mineral. 
     
     
         5 . The abrasive pad according to  claim 1 , wherein the abrading portions have top faces of 4 to 100 mm 2 . 
     
     
         6 . The abrasive pad according to  claim 1 , wherein a content of the filler as a percentage of the total volume of the abrasive material is from 10 to 50 vol %. 
     
     
         7 . A glass substrate abrading method using the abrasive pad described in  claim 1 , comprising:
 securing a second surface side of the base material layer on a surface plate and bringing the abrasive layer into contact with an object to be abraded; and relatively rubbing the abrasive pad and the object to be abraded while introducing grinding fluid between the object to be abraded and the abrasive layer.