Exposure apparatus, exposing method, device manufacturing method, program, and recording medium

Abstract

An exposure apparatus that exposes a substrate by exposure light via liquid between an optical member and the substrate includes: a liquid immersion member that forms an immersion liquid space on an object and comprises first and second members, the first member disposed at at least a portion of surrounding of the optical member, the second member disposed at at least a portion of surrounding of an optical path of the exposure light below of the first member, being movable with respect to the first member and comprising a second upper surface and a second lower surface, the second upper surface being opposite to a first lower surface of the first member via a gap, the second lower surface being capable of being opposite to the object, the object being movable below the optical member; and a vibration isolator that suppresses vibration of the first member.

1 . An exposure apparatus in which a substrate is exposed to exposure light via liquid between an optical member and the substrate, the exposure apparatus comprising:
 a reference frame;   an optical system including the optical member, which is supported by the reference frame;   a liquid immersion member that is configured to form an immersion liquid space and that includes a first member disposed to surround a path of the exposure light and a second member disposed to surround the path of the exposure light, the first member having a first opening via which the exposure light is projected and a first lower surface disposed around the first opening, the second member having a second opening via which the exposure light is projected and a second lower surface disposed around the second opening, and the first lower surface being disposed between the path of the exposure light and the second lower surface;   a driving apparatus configured to relatively move the second member with respect to the first member, the second member being movable by the driving apparatus in a direction substantially perpendicular to an optical axis of the optical member in order to decrease a relative speed between the second member and the substrate; and   a vibration isolator by which the reference member is isolated from vibrations caused by the movement of the second member.