Physical Quantity Detection Device, Manufacturing Method For Physical Quantity Detection Device, Electronic Apparatus, And Moving Object

Abstract

A gyro vibrating element includes a drive signal pattern including a drive signal electrode to which a drive signal is applied and a drive signal wire connected to the drive signal electrode, a first detection signal pattern including a first detection electrode that outputs a first detection signal and a first detection signal wire connected to the first detection electrode, the first detection signal pattern being capacitively coupled to the drive signal pattern, and a second detection signal pattern including a second detection electrode that outputs a second detection signal opposite in phase to the first detection signal and a second detection signal wire connected to the second detection electrode, the second detection signal pattern being capacitively coupled to the drive signal pattern. Any one of the first detection signal pattern, the second detection signal pattern, and the drive signal pattern includes an adjustment pattern for adjusting an area of the signal pattern.

What is claimed is: 
     
         1 . A physical quantity detection device comprising:
 a drive signal pattern including a drive electrode to which a drive signal is applied and a drive signal wire connected to the drive electrode;   a first detection signal pattern including a first detection electrode that outputs a first detection signal and a first detection signal wire connected to the first detection electrode, the first detection signal pattern being capacitively coupled to the drive signal pattern; and   a second detection signal pattern including a second detection electrode that outputs a second detection signal opposite in phase to the first detection signal and a second detection signal wire connected to the second detection electrode, the second detection signal pattern being capacitively coupled to the drive signal pattern, wherein   any one of the first detection signal pattern, the second detection signal pattern, and the drive signal pattern includes an adjustment pattern for adjusting an area of the signal pattern.   
     
     
         2 . The physical quantity detection device according to claim  1 , wherein the adjustment pattern includes a first pattern portion having first width in a direction crossing an extending direction of the adjustment pattern and a second pattern portion having second width smaller than the first width in the direction. 
     
     
         3 . The physical quantity detection device according to  claim 1 , further comprising a vibrating element including a base section and a vibrating section connected to the base section, wherein
 the drive electrode, the first detection electrode, and the second detection electrode are disposed in the vibrating section,   the drive signal wire, the first detection signal wire, and the second detection signal wire are disposed in the base section, and   the adjustment pattern is disposed in the base section.   
     
     
         4 . The physical quantity detection device according to  claim 1 , further comprising a vibrating element including a base section, a vibrating section connected to the base section, and a fixed section connected to the base section, wherein
 the drive signal wire, the first detection signal wire, and the second detection signal wire are disposed in both of the base section and the fixed section, and   the adjustment pattern is disposed in the fixed section.   
     
     
         5 . The physical quantity detection device according to  claim 1 , further comprising:
 a vibrating element;   a relay board; and   an electronic element electrically connected to the vibrating element by the relay board, wherein   the drive signal pattern, the first detection signal pattern, and the second detection signal pattern are disposed across the vibrating element and the relay board, and   the adjustment pattern is disposed on the relay board.   
     
     
         6 . The physical quantity detection device according to  claim 1 , further comprising:
 a vibrating element; and   a container that houses the vibrating element, wherein   the vibrating element and the container are electrically connected to each other by a connecting section,   the drive signal pattern, the first detection signal pattern, and the second detection signal pattern are disposed across the vibrating element and the container via the connecting section, and   the adjustment pattern is disposed in the container.   
     
     
         7 . The physical quantity detection device according to  claim 1 , wherein
 the adjustment pattern and the signal pattern to be capacitively coupled among the drive signal pattern, the first detection signal pattern, and the second detection signal pattern are disposed to be opposed to each other, and   a constant potential pattern is disposed between the adjustment pattern and the signal pattern.   
     
     
         8 . The physical quantity detection device according to  claim 1 , wherein
 the adjustment pattern and the signal pattern to be capacitively coupled among the drive signal pattern, the first detection signal pattern, and the second detection signal pattern are disposed to be opposed to each other, and   a region not electrostatically shielded is present between the adjustment pattern and the signal pattern.   
     
     
         9 . The physical quantity detection device according to claim  1 , wherein
 the adjustment pattern and the signal pattern to be capacitively coupled among the drive signal pattern, the first detection signal pattern, and the second detection signal pattern are disposed to be opposed to each other, and   a region where a constant potential pattern is disposed and a region not electrostatically shielded are present between the adjustment pattern and the signal pattern.   
     
     
         10 . An electronic apparatus comprising the physical quantity detection device according to  claim 1 . 
     
     
         11 . An electronic apparatus comprising the physical quantity detection device according to  claim 2 . 
     
     
         12 . An electronic apparatus comprising the physical quantity detection device according to  claim 3 . 
     
     
         13 . An electronic apparatus comprising the physical quantity detection device according to  claim 4 . 
     
     
         14 . A moving object comprising the physical quantity detection device according to  claim 1 . 
     
     
         15 . A moving object comprising the physical quantity detection device according to  claim 2 . 
     
     
         16 . A moving object comprising the physical quantity detection device according to  claim 3 . 
     
     
         17 . A moving object comprising the physical quantity detection device according to  claim 4 . 
     
     
         18 . A manufacturing method for a physical quantity detection device including:
 a drive signal pattern including a drive electrode to which a drive signal is applied and a drive signal wire connected to the drive electrode;   a first detection signal pattern including a first detection electrode that outputs a first detection signal and a first detection signal wire connected to the first detection electrode, the first detection signal pattern being capacitively coupled to the drive signal pattern; and   a second detection signal pattern including a second detection electrode that outputs a second detection signal opposite in phase to the first detection signal and a second detection signal wire connected to the second detection electrode, the second detection signal pattern being capacitively coupled to the drive signal pattern   any one of the first detection signal pattern, the second detection signal pattern, and the drive signal pattern including an adjustment pattern for adjustment,   the manufacturing method for the physical quantity device comprising reducing, by changing an area of the adjustment pattern, a difference between capacitance due to the capacitive coupling between the first detection signal pattern and the drive signal pattern and capacitance due to the capacitive coupling between the second detection signal pattern and the drive signal pattern.   
     
     
         19 . The manufacturing method for the physical quantity detection device according to  claim 18 , wherein the changing the area of the adjustment pattern includes preparing a physical quantity detection device in which the first detection signal pattern or the second detection signal pattern includes the adjustment pattern and the capacitance of the detection signal pattern including the adjustment pattern is larger than the capacitance of the other, removing at least a part of the adjustment pattern with an energy ray, and reducing the area of the adjustment pattern. 
     
     
         20 . The manufacturing method for the physical quantity detection device according to  claim 18 , wherein the changing the area of the adjustment pattern includes preparing a physical quantity detection device in which the first detection signal pattern or the second detection signal pattern includes the adjustment pattern and the capacitance of the detection signal pattern including the adjustment pattern is smaller than the capacitance of the other and increasing the area of the adjustment pattern with at least one of vapor deposition, sputtering, and an ion beam.