Film-forming apparatus and film-forming method

Abstract

There is provided a film-forming apparatus including a roll-to-roll mechanism and a heating unit. The roll-to-roll mechanism is configured to transport a film-forming target and includes a tensile force relaxation unit configured to relax a tensile force applied to the transported film-forming target. The heating unit is configured to heat the film-forming target transported by the roll-to-roll mechanism.

1 . An apparatus, comprising:
 a roll-to-roll mechanism configured to transport a film target made of copper, and that includes a tensile force relaxation unit configured to relax a tensile force applied to the transported film target to be equal to or smaller than a tensile force at which twinning deformation occurs in the copper; and   a heating unit configured to heat the film target transported by the roll-to-roll mechanism.   
     
     
         2 . The apparatus according to  claim 1 , wherein the tensile force relaxation unit includes a pinch roll configured to sandwich the film target. 
     
     
         3 . The apparatus according to  claim 2 , wherein
 the pinch roll includes   a guide roll configured to guide transport of the film target, and   an elastic roll that has a roll surface made of an elastic material, and the elastic roll is pushed by the guide roll such that the film target is sandwiched between the elastic roll and the guide roll.   
     
     
         4 . The apparatus according to  claim 1 , wherein the tensile force relaxation unit includes a multiple-stage roll that includes a plurality of rolls. 
     
     
         5 . The apparatus according to  claim 1 , further comprising a slack detection sensor configured to detect an amount of slack of the film target, wherein
 the tensile force relaxation unit is further configured to adjust the tensile force applied to the film target in accordance with an output of the slack detection sensor.   
     
     
         6 . The apparatus according to  claim 1 , wherein the tensile force relaxation unit is further configured to relax the tensile force applied to the film target to be smaller than 1 MPa. 
     
     
         7 . The apparatus according to  claim 1 , further comprising a film material supply unit configured to supply a carbon source substance that contains carbon to the film target heated by the heating unit. 
     
     
         8 . A method, comprising:
 setting a film target made of copper in a roll-to-roll mechanism;   transporting the film target by the roll-to-roll mechanism;   supplying a film material to the film target; and   heating the film target in a state in which a tensile force applied to the film target by the roll-to-roll mechanism is relaxed to be equal to or smaller than a tensile force at which twinning deformation occurs in the copper.   
     
     
         9 . A method according to  claim 8 , wherein the film target is heated after transport of the film target by the roll-to-roll mechanism is stopped and the tensile force is relaxed. 
     
     
         10 . The method according to  claim 8 , further comprising sandwiching the film target. 
     
     
         11 . The method according to  claim 8 , further comprising:
 detecting an amount of slack of the film target; and   adjusting the tensile force applied to the film target in accordance with the amount of the slack of the film target.   
     
     
         12 . The method according to  claim 8 , further comprising relaxing the tensile force applied to the film target to be smaller than 1 MPa. 
     
     
         13 . The method according to  claim 8 , further comprising supplying a carbon source substance that contains carbon to the heated film target.