Laser crystallizing apparatus

Abstract

Provided is a laser crystallizing apparatus including a laser generator generating a laser beam and an optical system photo-converting the laser beam to make a converted laser beam. A beam transmitting unit includes a passage through which the converted laser beam is transmitted into the chamber. The beam transmitting unit includes a chamber window provided on the chamber to transmit the laser beam, and a shield window movably disposed below the chamber window to prevent a material generated in the chamber from reaching the chamber window.

What is claimed is: 
     
         1 . A laser crystallizing apparatus, comprising:
 a laser generator generating a laser beam;   an optical system photo-converting the laser beam to make a converted laser beam; and   a beam transmitting unit including a passage through which the converted laser beam is transmitted into a chamber,   wherein the beam transmitting unit includes:   a chamber window provided on the chamber to transmit the laser beam, and   a shield window movably disposed below the chamber window to prevent a material generated in the chamber from reaching the chamber window.   
     
     
         2 . The laser crystallizing apparatus of  claim 1 , wherein:
 the beam transmitting unit further includes a shield mask in which an open region through which the laser beam passes is formed, and wherein a target substrate on which a target thin film is formed is disposed in the chamber.   
     
     
         3 . The laser crystallizing apparatus of  claim 2 , wherein:
 the shield mask includes two or more open regions formed on a path where the laser beam is transmitted to the inside of the chamber and a path where the laser beam is transmitted to the outside of the chamber, respectively.   
     
     
         4 . The laser crystallizing apparatus of  claim 2 , wherein:
 the shield mask includes aluminum (Al) or stainless steel (SUS).   
     
     
         5 . The laser crystallizing apparatus of  claim 1 , wherein:
 the shield window includes quartz.   
     
     
         6 . The laser crystallizing apparatus of  claim 1 , wherein:
 the shield window is movable in a vertical direction with respect to a length direction of the chamber window.   
     
     
         7 . The laser crystallizing apparatus of  claim 1 , wherein:
 an edge of the shield window is supported by a jig, and wherein the jig is moveable by driving a linear motor supporting the jig.   
     
     
         8 . The laser crystallizing apparatus of  claim 1 , wherein:
 the laser beam is a linear laser beam having a long axis of from about 200 mm to about 3,000 mm and a short axis of from about 0.1 mm to about 20 mm.   
     
     
         9 . The laser crystallizing apparatus of  claim 1 , wherein:
 the laser beam is transmitted into the chamber window at an angle of from about 1° to about 10° with respect to a bottom surface of the chamber window.   
     
     
         10 . The laser crystallizing apparatus of  claim 1 , wherein:
 the shield window has a polygonal column shape having an even number of surfaces.   
     
     
         11 . The laser crystallizing apparatus of  claim 10 , wherein:
 the beam transmitting unit further includes a shield mask in which an open region through which the laser beam passes is formed.   
     
     
         12 . The laser crystallizing apparatus of  claim 10 , wherein:
 the shield window is rotatable.   
     
     
         13 . The laser crystallizing apparatus of  claim 10 , wherein:
 the shield window has any one shape of a hexagon, an octagon, and a decagon.   
     
     
         14 . The laser crystallizing apparatus of  claim 10 , wherein:
 two or more shield windows are disposed on a path where the laser beam is transmitted into the chamber and a path where the laser beam is transmitted to the outside of the chamber, respectively.   
     
     
         15 . A laser crystallizing apparatus, comprising:
 a laser generator configured to generate a laser beam;   a chamber; and   a beam transmitting unit disposed on the chamber, wherein the beam transmitting unit comprises:
 a chamber window disposed on an outer surface of the chamber, wherein the chamber window is configured to transmit the laser beam; 
 a shield mask comprising at least one open region disposed inside the chamber, wherein the at least one open region is configured to transmit the laser beam; and 
 a shield window disposed between the shield mask and the chamber window, wherein the shield window is configured to absorb one or more contaminative materials generated inside the chamber, and wherein the shield window is movable to position a plurality of surfaces of the shield windows adjacent to the at least one open region of the shield mask to absorb the one or more contaminative materials. 
   
     
     
         16 . The laser crystallizing apparatus of  claim 15 , wherein the shield mask includes aluminum (Al) or stainless steel (SUS). 
     
     
         17 . The laser crystallizing apparatus of  claim 15 , wherein the shield window includes quartz. 
     
     
         18 . The laser crystallizing apparatus of  claim 15 , wherein an edge of the shield window is supported by a jig, and wherein the jig is moveable by driving a linear motor supporting the jig. 
     
     
         19 . The laser crystallizing apparatus of  claim 15 , wherein the laser beam is a linear laser beam having a long axis of from about 200 mm to about 3,000 mm and a short axis of from about 0.1 mm to about 20 mm. 
     
     
         20 . The laser crystallizing apparatus of  claim 15 , wherein the laser beam is transmitted into the chamber window at an angle of from about 1° to about 10° with respect to a bottom surface of the chamber window.