Susceptor and substrate processing apparatus

Abstract

A susceptor includes a plate part, a first heater for heating a first portion of the plate part, a second heater for heating a second portion of the plate part, and a heat insulating portion for thermally insulating the first portion and the second portion from each other on an upper surface side of the plate part.

What is claimed is: 
     
         1 . A susceptor comprising:
 a plate part;   a first heater for heating a first portion of the plate part;   a second heater for heating a second portion of the plate part; and   a heat insulating portion for thermally insulating the first portion and the second portion from each other on an upper surface side of the plate part.   
     
     
         2 . The susceptor according to  claim 1 , wherein the heat insulating portion is a grooved portion provided in the plate part on the upper surface side. 
     
     
         3 . The susceptor according to  claim 1 , wherein the second portion surrounds the first portion as viewed in plan. 
     
     
         4 . The susceptor according to  claim 3 , further comprising:
 a third portion formed as a portion of the plate part, the third portion surrounding the second portion as viewed in plan;   a third heater for heating the third portion; and   an outer heat insulating portion for thermally insulating the second portion and the third portion from each other on the upper surface side of the plate part.   
     
     
         5 . The susceptor according to  claim 1 , wherein each of the first portion and the second portion is formed in sectoral form as viewed in plan. 
     
     
         6 . The susceptor according to  claim 1 , wherein the first portion is a portion including an outer edge of the plate part, and the second portion is a portion including an outer edge of the plate part. 
     
     
         7 . The susceptor according to  claim 3 , further comprising:
 a plurality of third portions formed as part of the plate part, the third portions as a whole surrounding the second portion as viewed in plan;   a plurality of third heaters provided in the plurality of third portions in a one-to-one relationship;   an outer heat insulating portion for thermally insulating the second portion and the plurality of third portions from each other on the upper surface side of the plate part; and   outer-edge-side heat insulating portions for thermally insulating the plurality of third portions from each other on the upper surface side of the plate part.   
     
     
         8 . The susceptor according to  claim 2 , further comprising:
 a first closing part provided on the first portion to close part of a groove in the grooved portion without contacting the second portion; and   a second closing part provided on the second portion to close part of a groove in the grooved portion without contacting the first portion and the first closing part.   
     
     
         9 . The susceptor according to  claim 2 , wherein the first portion and the second portion are separate parts;
 a projection is provided on a side surface of the first portion, the second portion being put on the projection; and   the grooved portion is formed by a side surface of the first portion, an upper surface of the projection and a side surface of the second portion.   
     
     
         10 . The susceptor according to  claim 1 , further comprising a cooling member attached to the plate part. 
     
     
         11 . The susceptor according to  claim 2 , further comprising a cooling member attached to the plate part,
 wherein the cooling member is attached to the plate part right below the grooved portion.   
     
     
         12 . The susceptor according to  claim 1 , further comprising an electrostatic chuck. 
     
     
         13 . The susceptor according to  claim 1 , wherein the heat insulating portion is a cooling device provided in the plate part. 
     
     
         14 . The susceptor according to  claim 1 , wherein the heat insulating portion has a grooved portion provided in the upper surface side of the plate part and a cooling device for cooling a portion of the plate part right below a groove of the grooved portion. 
     
     
         15 . The susceptor according to  claim 14 , wherein the cooling device is embedded in the plate part right below the groove. 
     
     
         16 . The susceptor according to  claim 14 , wherein the cooling device is embedded in the plate part at positions on opposite sides of a portion of the plate part right below the groove. 
     
     
         17 . The susceptor according to  claim 14 , wherein the cooling device has a cooling medium passage through which a cooling medium flows;
 the cooling medium passage includes a first cooling medium passage passing through the first portion, and a second cooling medium passage connecting to the first cooling medium passage and passing through the portion of the plate part right below the groove;   a heat transfer inhibiting part for hindering heat transfer between the cooling medium and the plate part is provided in the first cooling medium passage; and   the cooling medium and the plate part contact each other in the second cooling medium passage.   
     
     
         18 . The susceptor according to  claim 17 , wherein the grooved portion is provided in annular form as viewed in plan;
 at least two sets of the first cooling medium passage and the second cooling medium passage are provided; and   positions at which the cooling medium enters the second cooling medium passage from the first cooling medium passage are provided generally at equal intervals along the grooved portion.   
     
     
         19 . The susceptor according to  claim 1 , wherein the heat insulating portion is a portion provided between the first portion and the second portion and is lower in heat conductivity than the first portion and the second portion;
 the upper surface of the heat insulating portion, the upper surface of the first portion and the upper surface of the second portion form one flat surface; and   because of the provision of the heat insulating portion, the first portion and the second portion do not abut on each other.   
     
     
         20 . The susceptor according to  claim 19 , wherein the heat insulating portion is formed of a material lower in heat conductivity than the materials of the first portion and the second portion. 
     
     
         21 . The susceptor according to  claim 19 , wherein the heat insulating portion, the first portion and the second portion are formed of the same material, and a plurality of voids are provided in the heat insulating portion. 
     
     
         22 . A substrate processing apparatus comprising:
 a susceptor having a plate part, a first heater for heating a first portion of the plate part, a second heater for heating a second portion of the plate part, and a heat insulating portion for thermally insulating the first portion and the second portion from each other on an upper surface side of the plate part;   a chamber in which the susceptor is housed; and   an gas exhaust part attached to a side surface of the chamber,   wherein the first portion is a portion including an outer edge of the plate part;   the second portion is a portion including an outer edge of the plate part; and   the gas exhaust part and the first portion are opposed to each other as viewed in plan.   
     
     
         23 . A substrate processing apparatus comprising:
 a susceptor having a plate part, a first heater for heating a first portion of the plate part, a second heater for heating a second portion of the plate part, and a heat insulating portion for thermally insulating the first portion and the second portion from each other on an upper surface side of the plate part;   a chamber in which the susceptor is housed; and   a gate valve attached to a side surface of the chamber,   wherein the first portion is a portion including an outer edge of the plate part;   the second portion is a portion including an outer edge of the plate part; and   the gate valve and the second portion are opposed to each other as viewed in plan.