Flexible display and method of manufacturing the same

Abstract

A flexible display and a method of manufacturing the same are disclosed. In one aspect, the method includes forming a sacrificial metal layer over a support substrate, the sacrificial metal layer formed of a metal material, and forming a barrier layer over the sacrificial metal layer, the barrier layer formed of an organic material. The method also includes exposing the sacrificial metal layer to oxygen so as to form a sacrificial metal oxide layer, forming a display unit over the barrier layer, and separating the barrier layer from the support substrate.

What is claimed is: 
     
         1 . A method of manufacturing a flexible display, the method comprising:
 forming a sacrificial metal layer over a support substrate, the sacrificial metal layer formed of a metal material;   forming a barrier layer over the sacrificial metal layer, the barrier layer formed of an organic material;   exposing the sacrificial metal layer to oxygen so as to form a sacrificial metal oxide layer;   forming a display unit over the barrier layer; and   separating the barrier layer from the support substrate.   
     
     
         2 . The method of  claim 1 , wherein the organic material has a viscosity greater than about 1 cP and equal to or less than about 100 cP. 
     
     
         3 . The method of  claim 1 , wherein the barrier layer is formed of an imide-based, acrylic-based, phenylene-based, or siloxane-based material. 
     
     
         4 . The method of  claim 1 , wherein the barrier layer has a thickness equal to or greater than about 10 nm and equal to or less than about 1 μm. 
     
     
         5 . The method of  claim 1 , wherein the sacrificial metal layer is formed of molybdenum (Mo). 
     
     
         6 . The method of  claim 1 , wherein the forming of the barrier layer comprises concurrently vaporizing the solvent from the organic material and forming the sacrificial metal oxide layer. 
     
     
         7 . The method of  claim 1 , wherein the barrier layer is additionally formed of a cross-linking agent, and wherein the method further comprises concurrently heating the barrier layer and forming the sacrificial metal oxide layer so as to cross-link the barrier layer with the cross-linking agent. 
     
     
         8 . The method of  claim 1 , wherein the separating comprises radiating a laser beam onto the sacrificial metal oxide layer. 
     
     
         9 . The method of  claim 1 , wherein the separating comprises dissolving the sacrificial metal oxide layer in water. 
     
     
         10 . The method of  claim 1 , wherein the sacrificial metal oxide layer is formed after the barrier layer is formed. 
     
     
         11 . A flexible display comprising:
 a barrier layer formed of an organic material where the barrier layer includes first and second surfaces opposing each other; and   a display unit over the first surface of the barrier layer and comprising a thin-film transistor (TFT) and a light-emitting device electrically connected to the TFT.   
     
     
         12 . The flexible display of  claim 11 , further comprising a protective film over the second surface of the barrier layer. 
     
     
         13 . The flexible display of  claim 11 , wherein the organic material has a viscosity greater than about 1 cP and equal to or less than about 100 cP. 
     
     
         14 . The flexible display of  claim 13 , further comprising a protective film over the second surface of the barrier layer. 
     
     
         15 . The flexible display of  claim 11 , wherein the organic material includes an imide-based, acrylic-based, phenylene-based, or siloxane-based material. 
     
     
         16 . The flexible display of  claim 15 , further comprising a protective film over the second surface of the barrier layer. 
     
     
         17 . The flexible display of  claim 11 , wherein the barrier layer has a thickness equal to or greater than about 10 nm and equal to or less than about 1 μm. 
     
     
         18 . The flexible display of  claim 17 , further comprising a protective film over the second surface of the barrier layer. 
     
     
         19 . A method of manufacturing a flexible display, the method comprising:
 depositing a metal over a support substrate so as to form a sacrificial metal layer;   depositing an organic material over the sacrificial metal layer so as to form a barrier layer;   exposing the sacrificial metal layer to oxygen so as to form a sacrificial metal oxide layer in a chamber; and   separating the barrier layer from the support substrate.   
     
     
         20 . The method of  claim 19 , further comprising forming a protective film over the barrier layer after the separating.