Methods for fabricating micro-devices

Abstract

The present invention provides methods utilizing current nano-technological processes for fabricating a range of micro-devices with significantly expanded capabilities, unique functionalities at microscopic levels, enhanced degree of flexibilities, reduced costs and improved performance in the fields of bioscience and medicine. Such fabricated micro-devices have significant improvements in many areas over the existing, conventional methods, which include, but are not limited to reduced overall costs, early disease detection, targeted drug delivery, targeted disease treatment and reduced degree of invasiveness in treatment.

1 . A method of fabricating a micro-device for biological and medical applications, wherein the method uses microelectronics processes and comprises:
 using at least one movable material and at least one structural material; and   forming at least one component which can move upon receiving a force or energy.   
     
     
         2 . The method of  claim 1 , wherein said movable material and said structural materials are joined with at least one space material. 
     
     
         3 . A method of fabricating a micro-device for biological and medical applications, wherein the method uses microelectronics processes and comprises the following steps:
 fabricating a integrated circuit containing memory and logic functions for data storage, data analysis, data comparison, data processing, and/or decision making purposes;   fabricating a micro-injector; and   fabricating a micro-container.   
     
     
         4 . The method of  claim 3 , further comprising the step of fabricating a signal receiver, a signal transmitter, a micro-sensor, a micro-positioning sensor, or a micro-motion apparatus which comprises a micro-motor, micro-propeller, or micro-stepper. 
     
     
         5 . The method of  claim 3 , further comprising the following steps:
 fabricating a signal receiver;   fabricating a signal transmitter;   fabricating a micro-sensor;   fabricating a micro-motion apparatus comprising of micro-motor, micro-propeller, and micro-stepper; and   fabricating a micro-positioning sensor.   
     
     
         6 . The method of  claim 3 , wherein the injection function is accomplished by means comprising hydraulic, electrical, electro-mechanical, electro-magnetic, capacitive, micro-electro mechanical, or piezoelectric force. 
     
     
         7 . The method of  claim 3 , wherein the technology for constructing an integrated circuit comprises complementary metal-oxide-semiconductor (CMOS) technology or bipolar complementary metal-oxide-semiconductor (BiCMOS) technology. 
     
     
         8 . The method of  claim 3 , wherein each injector is optionally connected to an integrated circuit on the micro-device and can be selected to turn on injection action to release compound. 
     
     
         9 . The method of  claim 3 , wherein said micro-containers have means to release stored compound in a timed manner. 
     
     
         10 . The method of  claim 3 , wherein said timed manner in compound release is achieved using a method selected from the following:
 using a desired thickness of bio-degradable capping layer at the surface of said micro-containers,   receiving instructions from integrated circuit on the same micro-device, and   means for receipt of a wireless signal from a computer.   
     
     
         11 . The method of  claim 3 , wherein said micro-container carries one or a combination of the following: a cancer killing drug; a cancer killing protein; a cancer killing signal; a signal which stimulates immune system against cancer; a signal which alerts immune system; a species which carry electrical signal; an agent disrupting response from cancer cells and system; an agent suppressing transfer of cancer cells, proteins, tissue, signal and response, hormones; a catalyst; a messenger RNA; a receptor; natural or synthesized human cells; natural or synthesized human proteins capable of killing tumors and triggering resistance to cancers; a Type II Interferon; a platinum-based cancer drug; sirt1 enzyme; resveratrol; and tumor necrosis factors (TNFs) for improved treatment effects. 
     
     
         12 . The method of  claim 3 , wherein said substrate comprises a silicon substrate. 
     
     
         13 . The method of  claim 3 , wherein the microelectronics process comprises thin film deposition, lithography, wet etch, dry etch, cleaning, wet processing, diffusion, ion implantation, annealing, or CMP. 
     
     
         14 . The method of  claim 3 , wherein said micro-device is fabricated on a wafer substrate, which can be cut and packaged into desired sizes with a desired number and combinations of types of micro-devices on each of packaged final block. 
     
     
         15 . The method of  claim 3 , wherein said spacial region, said moving component, said micro-container, and said micro-injector each have a size from 0.05 micron to 1 centimeter, and a minimum feature from 0.01 micron to 20 microns. 
     
     
         16 . The method of  claim 15 , wherein said spacial region, said moving component, said micro-container, and said micro-injector each have a size from 0.1 micro to 5 millimeter, and minimum feature from 0.01 micron to 0.5 micron. 
     
     
         17 . The method of  claim 3 , wherein said micro-device carries one or a combination of the following: a cancer killing drug, a cancer killing protein, a cancer killing signal, a signal which stimulates immune system against cancer, a signal which alerts immune system, a species which carry electrical signal, an agent disrupting response from cancer cells and system, an agent suppressing transfer of cancer cells, proteins, tissue, signal and response, and virus. 
     
     
         18 . The method of  claim 3 , wherein said micro-devices optionally have bio-degradation functions and capabilities. 
     
     
         19 . The method of  claim 3 , wherein said micro-devices optionally have disintegration capabilities and decompose into pieces with sizes smaller than 1 micron.