Mems micro-mirror assembly

Abstract

A MEMS micro-mirror assembly ( 250, 300, 270, 400 ) comprising, a MEMS device ( 240 ) which comprises a MEMS die ( 241 ) and a magnet ( 231 ); a flexible PCB board ( 205 ) to which the MEMS device ( 240 ) is mechanically, and electrically, connected; wherein the flexible PCB board ( 205 ) further comprises a first extension portion ( 205 b ) which comprises a least one electrical contact ( 259 a,b ) which is useable to electrically connect the MEMS micro-mirror assembly ( 250, 300, 270, 400 ) to another electrical component). There is further provided a projection system comprising such a MEMS micro-mirror assembly ( 250, 300, 270, 400 ).

1 - 15 . (canceled). 
     
     
         16 . An apparatus comprising:
 a microelectromechanical system (MEMS) device; and   a flexible printed circuit board (PCB) coupled to the MEMS device, the flexible PCB comprising at least one electrical contact operable to couple the MEMS device to another electrical component.   
     
     
         17 . The apparatus of  claim 16 , the MEMS device mounted on the flexible PCB. 
     
     
         18 . The apparatus of  claim 16 , the MEMS device comprising a coil, the at least one electrical contact electrically coupled to the coil. 
     
     
         19 . The apparatus of  claim 16 , the MEMS device a mirror to oscillate about at least one axis. 
     
     
         20 . The apparatus of  claim 16 , the flexible PCB comprising a first alignment mark, the first alignment mark comprising an indication of a location on the flexible PCB to attach the MEMS device. 
     
     
         21 . The apparatus of  claim 20 , the flexible PCB comprising a second alignment mark, the second alignment mark comprising an indication of a location on the flexible PCB to attach a magnet, the magnet to provide a magnetic field to actuate the MEMS device. 
     
     
         22 . The apparatus of  claim 16 , the flexible PCB comprising at least one reinforced area. 
     
     
         23 . The apparatus of  claim 22 , the at least one reinforced area thicker than other areas of the flexible PCB. 
     
     
         24 . The apparatus of  claim 16 , a length of at least one dimension of the flexible PCB board substantially the same as a length of at least one dimension of the MEMS device. 
     
     
         25 . A system comprising:
 a light source to emit a light beam;   a microelectromechanical system (MEMS) device comprising a micro-mirror to oscillate about at least one oscillation axis, the micro-mirror in an optical path of the light beam; and   a flexible printed circuit board (PCB) coupled to the MEMS device, the flexible PCB comprising at least one electrical contact operable to couple the MEMS device to another electrical component.   
     
     
         26 . The system of  claim 25 , the MEMS device mounted on the flexible PCB. 
     
     
         27 . The system of  claim 25 , the MEMS device comprising a coil, the at least one electrical contact electrically coupled to the coil. 
     
     
         28 . The system of  claim 25 , the flexible PCB comprising a first alignment mark, the first alignment mark comprising an indication of a location on the flexible PCB to attach the MEMS device. 
     
     
         29 . The system of  claim 28 , the flexible PCB comprising a second alignment mark, the second alignment mark comprising an indication of a location on the flexible PCB to attach a magnet, the magnet to provide a magnetic field to actuate the MEMS device. 
     
     
         30 . The system of  claim 29 , comprising the magnet. 
     
     
         31 . The system of  claim 25 , the flexible PCB comprising at least one reinforced area. 
     
     
         32 . The system of  claim 31 , the at least one reinforced area thicker than other areas of the flexible PCB. 
     
     
         33 . The system of  claim 25 , a length of at least one dimension of the flexible PCB board substantially the same as a length of at least one dimension of the MEMS device. 
     
     
         34 . The system of  claim 25 , comprising the another electrical component, the another electrical component a power source. 
     
     
         35 . An apparatus comprising:
 a die comprising a microelectromechanical system (MEMS) device; and   a flexible printed circuit board (PCB) coupled to the MEMS device, the flexible PCB comprising at least one electrical contact operable to couple the MEMS device to another electrical component.   
     
     
         36 . The apparatus of  claim 35 , the die mounted to a first side of the flexible PCB. 
     
     
         37 . The apparatus of  claim 35 , the at least one electrical contact comprising a first electrical contact and a second electrical contact, the second electrical contact redundant to the first electrical contact. 
     
     
         38 . The apparatus of  claim 35 , comprising at least one wire bond to electrically couple the at least one electrical contact to the MEMS device.