Imprint material

Abstract

Imprint method and apparatus apply an imprint material on a substrate. The imprint material includes a luminescent material that undergoes fluorescence or phosphorescence upon receiving ultraviolet light. The imprint material further includes an ultraviolet curable resin that is cured with ultraviolet light. A mold with a pattern imprints into the imprint material applied to the substrate. The imprint material applied to the substrate is cured with ultraviolet light. After releasing the mold from the substrate imprinted with the pattern, any residual resin remaining on the mold can be detected with ultraviolet light.

What is claimed is: 
     
         1 . An imprint material for an imprint apparatus that forms a pattern of the imprint material on a substrate using a mold, the imprint material comprising:
 a luminescent material that undergoes fluorescence or phosphorescence upon receiving ultraviolet light in a state of adhering to a surface of the mold on which a concave and convex pattern is formed.   
     
     
         2 . The imprint material according to  claim 1 , further comprising:
 an ultraviolet curable resin that is cured with ultraviolet light,   wherein the imprint material is composed of a mixture of the ultraviolet curable resin and the luminescent material.   
     
     
         3 . The imprint material according to  claim 1 , wherein the luminescent material is at least one of platinum barium cyanide, zinc sulfide, cadmium sulfide, radium compound, or promethium compound. 
     
     
         4 . The imprint material according to  claim 2 , wherein the luminescent material is at least one of platinum barium cyanide, zinc sulfide, cadmium sulfide, radium compound, or promethium compound.