US2017025633A1PendingUtilityA1

Method for Manufacturing Sealed Structure

Assignee: SEMICONDUCTOR ENERGY LABPriority: Oct 14, 2011Filed: Oct 7, 2016Published: Jan 26, 2017
Est. expiryOct 14, 2031(~5.2 yrs left)· nominal 20-yr term from priority
H10K 71/421H10K 50/8426H10K 59/8722B23K 26/28H01L 51/5246H01L 51/56H05B 33/04H10K 71/00H01J 9/26
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Claims

Abstract

A method for manufacturing a sealed structure in which few cracks are generated is provided. Scan with the laser beam is performed so that there is no difference in an irradiation period between the middle portion and the perimeter portion of the glass layer and so that the scanning direction is substantially parallel to the direction in which solidification of the glass layer after melting proceeds. More specifically, in a region where the beam spot is overlapped with the glass layer, scan is performed with a laser beam having a beam spot shape whose width in a scanning direction is substantially uniform. Further, as a laser beam with which the glass layer is irradiated, a laser beam (a linear laser beam) having a linear beam spot shape with a major axis and a minor axis which is orthogonal to the major axis.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . (canceled) 
     
     
         2 . A laser irradiation method comprising:
 forming a linear laser beam having a major axis and a minor axis orthogonal to the major axis;   scanning an object with the linear laser beam in a direction orthogonal to the major axis; and   turning the linear laser beam around a turn axis, wherein the turn axis is on one end of the linear laser beam.   
     
     
         3 . The laser irradiation method according to  claim 2 , wherein the object is a glass layer. 
     
     
         4 . The laser irradiation method according to  claim 2 , wherein the object is curved at the step of turning the linear laser beam around the turn axis. 
     
     
         5 . The laser irradiation method according to  claim 2 , further comprising a step of scanning the object with the linear laser beam after turning the linear laser beam around the turn axis. 
     
     
         6 . A laser irradiation method comprising:
 forming a linear laser beam having a major axis and a minor axis orthogonal to the major axis;   scanning an object with the linear laser beam in a direction orthogonal to the major axis; and   turning the linear laser beam around a turn axis, wherein the turn axis is on an extension of the linear laser beam.   
     
     
         7 . The laser irradiation method according to  claim 6 , wherein the object is a glass layer. 
     
     
         8 . The laser irradiation method according to  claim 6 , wherein the object is curved at the step of turning the linear laser beam around the turn axis. 
     
     
         9 . The laser irradiation method according to  claim 6 , further comprising a step of scanning the object with the linear laser beam after turning the linear laser beam around the turn axis.

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