Cooling device and multi-chamber heat treatment device

Abstract

A cooling device configured to cool an article to be treated by immersing the article to be treated in coolant includes a cooling chamber configured to accommodate the article to be treated and store the coolant therein, a supply nozzle configured to supply the coolant into the cooling chamber from below the article to be treated, a recovery pipeline configured to collect the coolant stored in the cooling chamber from above the article to be treated, and a pump configured to pump the coolant collected by the recovery pipeline to the supply nozzle.

What is claimed is: 
     
         1 . A cooling device configured to cool an article to be treated by immersing the article to be treated in coolant, the cooling device comprising:
 a cooling chamber configured to accommodate the article to be treated and store the coolant therein;   a supply nozzle configured to supply the coolant into the cooling chamber from below the article to be treated;   a recovery pipeline configured to collect the coolant stored in the cooling chamber from above the article to be treated; and   a pump configured to pump the coolant collected by the recovery pipeline to the supply nozzle,   wherein the supply nozzle is constituted by a tubular body having an upper end serving as an opening end through which the coolant is ejected and through-holes passing through both sides thereof.   
     
     
         2 . The cooling device according to  claim 1 , comprising a heat exchanger configured to cool the coolant collected by the recovery pipeline. 
     
     
         3 . A multi-chamber heat treatment device comprising:
 a heating device configured to heat an article to be treated; and   a cooling device according to  claim 1 .   
     
     
         4 . A multi-chamber heat treatment device comprising:
 a heating device configured to heat an article to be treated; and   a cooling device according to  claim 2 .