Impedance matching device, linear motion module, and radio frequency power supply device

Abstract

An impedance matching device includes a first variable capacitor connected to an RF power source and including a first shaft moving linearly, a first linear motion unit axially coupled to the first shaft of the first variable capacitor to provide linear motion, a first insulating joint connecting the first shaft to a first driving shaft of the first linear motion unit, and a first displacement sensor adapted to measure a movement distance of the first driving shaft of the first linear motion unit.

What is claimed is: 
     
         1 . A radio frequency (RF) power supply device comprising:
 a single RF power source; and   an impedance matching unit disposed between the RF power source and at least one load;   wherein the impedance matching unit comprises:   a first variable capacitor including a first shaft moving linearly;   a first linear motion unit axially coupled to the first shaft of the first variable capacitor to provide linear motion;   a first insulating joint connecting the first shaft to a first end of a first driving shaft of the first linear motion unit; and   a first displacement sensor adapted to measure a movement distance of the first driving shaft of the first linear motion unit; and   wherein the first linear motion unit comprises:   a coil bobbin coupled to a second end of the first driving shaft; and   a first permanent magnet unit disposed to encircle the first driving shaft and configured to provide linear motion to the coil bobbin.   
     
     
         2 . The radio frequency (RF) power supply device of  claim 1 , further comprising:
 a motion control unit adapted to control the first linear motion unit;   a power detection unit adapted to detect a reflected wave reflected in a direction of the RF power source; and   a control unit adapted to control the motion control unit by receiving an output signal of the power detection unit and an output signal of the first displacement sensor.   
     
     
         3 . A radio frequency (RF) power supply device comprising:
 a single RF power source; and   an impedance matching unit disposed between the RF power source and at least one load;   wherein the impedance matching unit comprises:   a first variable capacitor including a first shaft moving linearly;   a first linear motion unit axially coupled to the first shaft of the first variable capacitor to provide linear motion;   a first insulating joint connecting the first shaft to a first end of a first driving shaft of the first linear motion unit;   a motion control unit adapted to control the first linear motion unit;   a power detection unit adapted to detect a reflected wave reflected in a direction of the RF power source; and   a control unit adapted to control the motion control unit by receiving an output signal of the power detection unit;   wherein the first linear motion unit comprises:   a coil bobbin coupled to a second end of the first driving shaft; and   a first permanent magnet unit disposed to encircle the first driving shaft and configured to provide linear motion to the coil bobbin; and   wherein a frequency of the RF power source is variable.   
     
     
         4 . A radio frequency (RF) power supply device comprising:
 a single RF power source; and   an impedance matching unit disposed between the RF power source and at least one load,   wherein the impedance matching unit comprises:   a first variable capacitor including a first shaft moving linearly;   a first linear motion unit axially coupled to the first shaft of the first variable capacitor to provide linear motion;   a first insulating joint connecting the first shaft to a first end of a first driving shaft of the first linear motion unit;   a front-end flange coupled to a first electrode of the first variable capacitor;   a back-end flange coupled to the first linear motion unit; and   a fixing part disposed to encircle the first insulating joint and having a first end coupled to the front-end flange and a second end coupled to the back-end flange; and   wherein the first linear motion unit comprises:   a coil bobbin coupled to a second end of the first driving shaft; and   a first permanent magnet unit disposed to encircle the first driving shaft and configured to provide linear motion to the coil bobbin.