Thermal spray coating, member for semiconductor manufacturing equipment, feedstock material for thermal spray, and method for producing thermal spray coating

Abstract

A thermal spray coating according to the present invention contains mainly magnesium, aluminum, oxygen, and nitrogen and has, as a main phase, a crystal phase of a MgO—AlN solid solution in which aluminum nitride is dissolved with magnesium oxide. The thermal spray coating is obtained by thermal spray of powder of a ceramic material containing mainly magnesium, aluminum, oxygen, and nitrogen and having, as a main phase, a crystal phase of a MgO—AlN solid solution in which aluminum nitride is dissolved with magnesium oxide.

What is claimed is: 
     
         1 . A feedstock material for thermal spray comprising powder of a ceramic material containing mainly magnesium, aluminum, oxygen, and nitrogen and having, as a main phase, a crystal phase of a MgO—AlN solid solution in which aluminum nitride is dissolved with magnesium oxide. 
     
     
         2 . The feedstock material for thermal spray according to  claim 1 , wherein the XRD peak of the MgO (200) plane measured with CuKα radiation shifts to a higher angle side with respect to 2θ=42.90°, which corresponds to the peak of the cubic crystal of magnesium oxide. 
     
     
         3 . The feedstock material for thermal spray according to  claim 1 , wherein, in component analysis of the feedstock material for thermal spray, the Mg/(Mg+Al) molar ratio is 0.62 or more. 
     
     
         4 . The feedstock material for thermal spray according to  claim 1 , wherein the feedstock material contains, as a subphase, a magnesium aluminum oxide. 
     
     
         5 . The feedstock material for thermal spray according to  claim 1 , wherein the feedstock material contains, as a subphase, a magnesium-aluminum oxynitride phase whose XRD peak measured with CuKα radiation appears at, at least, 2θ=47° to 49°. 
     
     
         6 . A method for producing a thermal spray coating comprising forming a thermal spray coating by plasma spray using the feedstock material for thermal spray according to  claim 1 .