Pattern forming method, resist composition for multiple development used in the pattern forming method, developer for negative development used in the pattern forming method, and rinsing solution for negative development used in the pattern forming method

Abstract

A pattern forming method, including: (A) coating a substrate with a positive resist composition of which solubility in a positive developer increases and solubility in a negative developer decreases upon irradiation with actinic rays or radiation, so as to form a resist film; (B) exposing the resist film; and (D) developing the resist film with a negative developer; a positive resist composition for multiple development used in the method; a developer for use in the method; and a rinsing solution for negative development used in the method.

1 . A method of manufacturing an electronic device, comprising:
 applying, to a substrate, a resist composition of which solubility in a positive developer which is an alkali developer increases and solubility in a negative developer containing an organic solvent decreases upon irradiation with actinic rays or radiation, so as to form a resist film;   exposing the resist film; and   developing the resist film with the negative developer,   wherein the negative developer containing an organic solvent is a developer consisting of butyl acetate, and the resist composition contains a resin having a monocyclic or polycyclic alicyclic hydrocarbon structure and contains a repeating unit represented by the following formula (pA):   
       
         
           
           
               
               
           
         
         wherein R represents a hydrogen atom, a halogen atom or a linear or branched alkyl group having a carbon number of 1 to 4, and a plurality of R's may be the same or different; 
         A represents a single bond, or a sole group or a combination of two or more groups selected from the group consisting of an alkylene group, an ether group, a thioether group, a carbonyl group, an ester group, an amido group, a sulfonamido group, a urethane group and a ureylene group; and 
         Rp 1  represents a group represented by any one of the following formulae (pI) to (pV); 
       
       
         
           
           
               
               
           
         
         in formulae (pI) to (pV), R 11  represents a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, an isobutyl group or a sec-butyl group; 
         Z represents an atomic group necessary for forming a cycloalkyl group together with the carbon atom; 
         R 12  to R 16  each independently represents a linear or branched alkyl group having a carbon number of 1 to 4 or a cycloalkyl group, provided that at least one of R 12  to R 14  or either one of R 15  and R 16  represents a cycloalkyl group; 
         R 17  to R 21  each independently represents a hydrogen atom, a linear or branched alkyl group having a carbon number of 1 to 4 or a cycloalkyl group, provided that at least one of R 17  to R 21  represents a cycloalkyl group and that either one of R 19  and R 21  represents a linear or branched alkyl group having a carbon number of 1 to 4 or a cycloalkyl group; 
         R 22  to R 25  each independently represents a hydrogen atom, a linear or branched alkyl group having a carbon number of 1 to 4 or a cycloalkyl group, provided that at least one of R 22  to R 25  represents a cycloalkyl group; and 
         R 23  and R 24  may combine with each other to form a ring. 
       
     
     
         2 . The method of manufacturing an electronic device according to  claim 1 , wherein the resin has a lactone group. 
     
     
         3 . The method of manufacturing an electronic device according to  claim 1 , further comprising: washing the resist film with a rinsing solution containing an organic solvent after the developing of the resist film with the negative developer. 
     
     
         4 . The method of manufacturing an electronic device according to  claim 3 , wherein the rinsing solution contains at least one kind of an organic solvent selected from the group consisting of a hydrocarbon-based solvent, a ketone-based solvent, an ester-based solvent, an alcohol-based solvent, an amide-based solvent and an ether-based solvent. 
     
     
         5 . The method of manufacturing an electronic device according to  claim 3 , wherein the rinsing solution contains at least one kind of an organic solvent selected from the group consisting of an alcohol-based solvent and an ester-based solvent. 
     
     
         6 . The method of manufacturing an electronic device according to  claim 1 , wherein the resist composition further contains a basic compound. 
     
     
         7 . The method of manufacturing an electronic device according to  claim 1 , wherein the resist composition further contains a fluorine-containing surfactant, a silicon-containing surfactant or a surfactant containing both a fluorine atom and a silicon atom. 
     
     
         8 . The method of manufacturing an electronic device according to  claim 1 , wherein the exposing of the resist film is performed with light having a wavelength of 193 nm. 
     
     
         9 . A method of manufacturing an electronic device, comprising:
 applying, to a substrate, a resist composition of which solubility in a positive developer which is an alkali developer increases and solubility in a negative developer containing an organic solvent decreases upon irradiation with actinic rays or radiation, so as to form a resist film;   exposing the resist film; and   developing the resist film with the negative developer,   wherein the resist composition contains a resin having a monocyclic or polycyclic alicyclic hydrocarbon structure and contains a repeating unit represented by the following formula (pA):   
       
         
           
           
               
               
           
         
         wherein R represents a hydrogen atom, a halogen atom or a linear or branched alkyl group having a carbon number of 1 to 4, and a plurality of R's may be the same or different; 
         A represents a single bond, or a sole group or a combination of two or more groups selected from the group consisting of an alkylene group, an ether group, a thioether group, a carbonyl group, an ester group, an amido group, a sulfonamido group, a urethane group and a ureylene group; and 
         Rp 1  represents a group represented by any one of the following formulae (pI) to (pV); 
       
       
         
           
           
               
               
           
         
         in formulae (pI) to (pV), R 11  represents a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, an isobutyl group or a sec-butyl group; 
         Z represents an atomic group necessary for forming a cycloalkyl group together with the carbon atom; 
         R 12  to R 16  each independently represents a linear or branched alkyl group having a carbon number of 1 to 4 or a cycloalkyl group, provided that at least one of R 12  to R 14  or either one of R 15  and R 16  represents a cycloalkyl group; 
         R 17  to R 21  each independently represents a hydrogen atom, a linear or branched alkyl group having a carbon number of 1 to 4 or a cycloalkyl group, provided that at least one of R 17  to R 21  represents a cycloalkyl group and that either one of R 19  and R 21  represents a linear or branched alkyl group having a carbon number of 1 to 4 or a cycloalkyl group; 
         R 22  to R 25  each independently represents a hydrogen atom, a linear or branched alkyl group having a carbon number of 1 to 4 or a cycloalkyl group, provided that at least one of R 22  to R 25  represents a cycloalkyl group; and 
         R 23  and R 24  may combine with each other to form a ring; 
         wherein the negative developer containing an organic solvent is ethyl-3-ethoxypropionate. 
       
     
     
         10 . The method of manufacturing an electronic device according to  claim 9 , wherein the resin has a lactone group. 
     
     
         11 . The method of manufacturing an electronic device according to  claim 9 , further comprising: washing the resist film with a rinsing solution containing an organic solvent after the developing of the resist film with the negative developer. 
     
     
         12 . The method of manufacturing an electronic device according to  claim 11 , wherein the rinsing solution contains at least one kind of an organic solvent selected from the group consisting of a hydrocarbon-based solvent, a ketone-based solvent, an ester-based solvent, an alcohol-based solvent, an amide-based solvent and an ether-based solvent. 
     
     
         13 . The method of manufacturing an electronic device according to  claim 11 , wherein the rinsing solution contains at least one kind of an organic solvent selected from the group consisting of an alcohol-based solvent and an ester-based solvent. 
     
     
         14 . The method of manufacturing an electronic device according to  claim 9 , wherein the resist composition further contains a basic compound. 
     
     
         15 . The method of manufacturing an electronic device according to  claim 9 , wherein the resist composition further contains a fluorine-containing surfactant, a silicon-containing surfactant or a surfactant containing both a fluorine atom and a silicon atom. 
     
     
         16 . The method of manufacturing an electronic device according to  claim 9 , wherein the exposing of the resist film is performed with light having a wavelength of 193 nm.