Ultrasonic transducer device, probe head, ultrasonic probe, electronic machine and ultrasonic diagnostic apparatus

Abstract

An ultrasonic transducer device includes a substrate on which a plurality of openings are arranged; a plurality of ultrasonic transducer elements, each of the ultrasonic transducer elements being provided to each of the openings of the plurality of openings, on a first surface of the substrate; and a member fixed to a second surface of the substrate, which is a surface on the opposite side of the first surface of the substrate. Provided to the member are a plurality of first groove sections, and a second groove section for bundling together the plurality of the first groove sections.

1 . An ultrasonic transducer device comprising:
 a vibrating member;   a first electrode disposed on the vibrating member;   a piezo electric member disposed on the first electrode;   a second electrode disposed on the piezo electric member such that the piezo electric member is located between the first electrode and the second electrode; and   a substrate disposed on the vibrating member, the substrate having a plurality of cavities,   at least one of the plurality of cavities communicating with a different one of the plurality of cavities.   
     
     
         2 . The ultrasonic transducer device according to  claim 1 , wherein
 the plurality of cavities are connected by a first air passage way.   
     
     
         3 . The ultrasonic transducer device according to  claim 2 , wherein
 a plurality of first air passages ways are connected with a second air passage way.   
     
     
         4 . The ultrasonic transducer device according to  claim 3 , wherein
 the second air passage way is connected with an exterior.   
     
     
         5 . The ultrasonic transducer device according to  claim 3 , wherein
 the plurality of first air passage ways and the second air passage way are a plurality of grooves.   
     
     
         6 . The ultrasonic transducer device according to  claim 3 , wherein
 the plurality of first air passage ways are connected with the second air passage way at an end of each of the plurality of first air passage ways.   
     
     
         7 . The ultrasonic transducer device according to  claim 3 , wherein
 both ends of the first air passage way are connected with one of a plurality of second air passage ways.   
     
     
         8 . The ultrasonic transducer device according to  claim 1 , further comprising
 a reinforcement member disposed on a second surface of the substrate, wherein   the second surface of the substrate is an opposite surface of a first surface of the substrate which faces the vibrating member.   
     
     
         9 . The ultrasonic transducer device according to  claim 8 , wherein
 the reinforcement member includes a plurality of first air passage ways connecting the plurality of cavities, and a second air passage way bundling the plurality of first air passage ways, and a through hole connecting the second air passage way and an exterior.   
     
     
         10 . The ultrasonic transducer device according to  claim 8 , wherein
 the reinforcement member includes a third air passage way that is connected with an exterior at a peripheral region of the reinforcement member.   
     
     
         11 . The ultrasonic transducer device according to  claim 8 , wherein
 a plurality of first air passage ways are disposed along a first direction,   a second air passage way is disposed along a second direction which is different from the first direction at a peripheral region of the reinforcement member.   
     
     
         12 . The ultrasonic transducer device according to  claim 11 , wherein
 the reinforcement member includes a third air passage way which is connected with an exterior without being connected with the first air passage ways or the second air passage way.   
     
     
         13 . The ultrasonic transducer device according to claim I, wherein
 the plurality of cavities are arranged in an arrayed shape.   
     
     
         14 . The ultrasonic transducer device according to  claim 4 , wherein
 the exterior communicates with an atmosphere.   
     
     
         15 . A probe head comprising the ultrasonic transducer device according to  claim 1 . 
     
     
         16 . An ultrasonic probe comprising:
 the probe head according to  claim 15 ; and   a processing apparatus configured to process a signal coming from the probe head.   
     
     
         17 . An electronic machine, comprising the ultrasonic probe according to  claim 16 . 
     
     
         18 . An ultrasonic diagnostic apparatus comprising:
 the ultrasonic probe according to  claim 16 ; and   a display device configured to display an image made based on the data signal coming from the probe head.   
     
     
         19 . An ultrasonic transducer device comprising:
 a vibrating member;   a first electrode and a second electrode configured to drive the vibrating member;   a plurality of cavities facing the vibrating member;   a plurality of first passage ways connecting the plurality of cavities; and   a second passage way bundling the plurality of first passage ways,   the second passage way communicating with an exterior.   
     
     
         20 . The ultrasonic transducer device according to  claim 19 , wherein
 the vibrating member is driven by a piezo electric member.   
     
     
         21 . The ultrasonic transducer device according to  claim 20 , wherein
 the first electrode, the second electrode and the piezo electric member are arranged at one side of the vibrating member, and the plurality of cavities are arranged at an opposite side of the vibrating member.