Logic finfet high-k/conductive gate embedded multiple time programmable flash memory

Abstract

A method for fabricating a multiple time programmable (MTP) device includes forming fins of a first conducting type on a substrate of a second conducting type. The method further includes forming a floating gate dielectric to partially surround the fins. The method also includes forming a floating gate on the floating gate dielectric. The method also includes forming a coupling film on the floating gate and forming a coupling gate on the coupling film.

What is claimed is: 
     
         1 . A method of fabricating a multiple time programmable (MTP) device, comprising:
 forming a plurality of fins of a first conducting type on a substrate of a second conducting type;   forming a floating gate dielectric to partially surround the plurality of fins;   forming a floating gate on the floating gate dielectric;   forming a coupling film on the floating gate; and   forming a coupling gate on the coupling film.   
     
     
         2 . The method of  claim 1 , in which the floating gate is configured to store logic states of the MTP device. 
     
     
         3 . The method of  claim 1 , in which the coupling film and coupling gate partially surround the floating gate. 
     
     
         4 . The method of  claim 1 , in which the floating gate comprises an input/output (I/O) device having the floating gate dielectric with an increased thickness. 
     
     
         5 . The method of  claim 1 , in which the floating gate dielectric has a dielectric constant greater than a dielectric constant of silicon oxide. 
     
     
         6 . The method of  claim 1 , further comprising forming an erase dielectric coupled to the floating gate. 
     
     
         7 . The method of  claim 1 , further comprising integrating the MTP device into a mobile phone, a set top box, a music player, a video player, an entertainment unit, a navigation device, a computer, a hand-held personal communication systems (PCS) unit, a portable data unit, and/or a fixed location data unit. 
     
     
         8 . A method of fabricating a multiple time programmable (MTP) device, comprising:
 the step of forming a plurality of fins of a first conducting type on a substrate of a second conducting type;   the step of forming a floating gate dielectric to partially surround the plurality of fins;   the step of forming a floating gate on the floating gate dielectric;   the step of forming a coupling film on the floating gate; and   the step of forming a coupling gate on the coupling film.   
     
     
         9 . The method of  claim 8 , further comprising integrating the MTP device into a mobile phone, a set top box, a music player, a video player, an entertainment unit, a navigation device, a computer, a hand-held personal communication systems (PCS) unit, a portable data unit, and/or a fixed location data unit. 
     
     
         10 . A multiple time programming (MTP) device, comprising:
 means for conducting current;   means for storing logic states which control the current in the current conducting means; and   means for controlling the logic states stored on the logic storing means.   
     
     
         11 . The MTP device of  claim 10 , further comprising erase means for removing the logic states stored on the logic storing means. 
     
     
         12 . The MTP device of  claim 11 , in which the logic storing means partially surrounds the current conducting means. 
     
     
         13 . The MTP device of  claim 11 , integrated into a mobile phone, a set top box, a music player, a video player, an entertainment unit, a navigation device, a computer, a hand-held personal communication systems (PCS) unit, a portable data unit, and/or a fixed location data unit.