Polishing cushion, polishing apparatus, polishing method, and article including object polished by the polishing method

Abstract

A polishing cushion for realizing a plurality of types of polishing with a single polishing apparatus. A polishing cushion according to one embodiment includes a first outer layer facing one out of a polishing member and a support member, a second outer layer facing the other out of the polishing member and the support member, an inner layer positioned between the first outer layer and the second outer layer; and a plurality of spaces formed in the second outer layer which the inner layer is able to enter. The hardness of the inner layer is lower than both of the hardness of the first outer layer and the hardness of the second outer layer.

1 . A polishing cushion comprising:
 a first outer layer facing one of a polishing member and a support member,   a second outer layer facing the other out of the polishing member and the support member;   an inner layer positioned between the first outer layer and the second outer layer; and   a plurality of spaces formed in the second outer layer which the inner layer is able to enter,   wherein a hardness of the inner layer is lower than both of the hardness of both the first outer layer and the hardness of the second outer layer.   
     
     
         2 . The polishing cushion according to  claim 1 , wherein the second outer layer is adjacent the support member. 
     
     
         3 . The polishing cushion according to  claim 2 ,
 wherein the second outer layer includes a surface containing openings and the surface is bonded with the inner layer.   
     
     
         4 . The polishing cushion according to  claim 3 ,
 wherein the plurality of spaces are through-holes.   
     
     
         5 . A polishing apparatus comprising:
 the polishing cushion according to  claim 4 ;   the polishing member; and   the support member.   
     
     
         6 . A polishing method using a polishing apparatus, the method comprising:
 polishing an object using the polishing apparatus where a polishing cushion is arranged between a polishing member and a support member,   wherein the polishing cushion includes   a first outer layer facing one of a polishing member and a support member,   a second outer layer facing the other of the polishing member and the support member,   an inner layer positioned between the first outer layer and the second outer layer; and   wherein the second outer layer includes a plurality of spaces which the inner layer is able to enter, and   wherein a hardness of the inner layer is lower than both of the hardness of the first outer layer and the hardness of the second outer layer.   
     
     
         7 . An article comprising:
 the object which is polished using the polishing method according to  claim 6 .