Substrate For Molecular Beam Epitaxy (MBE) HGCDTE Growth
Abstract
A semiconductor structure having a first semiconductor body having an upper surface with a non <211> crystallographic orientation and a second semiconductor body having a surface with a <211> crystallographic orientation, the surface of the second semiconductor body being bonded to a bottom surface of the first semiconductor body. A layer comprising CdTe is epitaxially disposed on the upper surface of the second semiconductor body. The second semiconductor body is CZ silicon, has a thickness less than 10 microns and has a diameter of at least eight inches. A getter having micro-cavities has a bottom surface formed on an upper surface of the first semiconductor body and has an upper surface bonded to a bottom surface of the second semiconductor body.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1 . A semiconductor structure, comprising:
a first semiconductor body; a getter layer; a second semiconductor body; wherein the getter layer has a bottom surface formed on an upper surface of the first semiconductor body and has an upper surface bonded to a bottom surface of the second semiconductor body.
2 . The semiconductor structure recited in claim 1 wherein the second semiconductor body has a surface with a <211>.
3 . The semiconductor structure recited in claim 2 including a layer comprising CdTe epitaxially disposed on the upper surface of the second semiconductor body.
4 . The semiconductor structure recited in claim 3 wherein the second semiconductor body has a thickness at least an order of magnitude thinner than the thickness of the first semiconductor body.
5 . The semiconductor body recited in claim 1 wherein the second semiconductor body is CZ silicon.
6 . The semiconductor structure recited in claim 5 wherein the second semiconductor body has a thickness less than 10 microns.
7 . The semiconductor structure recited in claim 1 wherein the first semiconductor body and the second semiconductor body are of the same semiconductor material.
8 . The semiconductor structure recited in claim 1 wherein the getter layer has nanocavities.
9 . The semiconductor structure recited in claim 8 wherein the second semiconductor body has a surface with a <211>.
10 . The semiconductor structure recited in claim 9 including a layer comprising CdTe epitaxially disposed on the upper surface of the second semiconductor body.
11 . The semiconductor structure recited in claim 1 wherein the first semiconductor body is FZ silicon.Join the waitlist — get patent alerts
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