Control method for the accerlation of a vacuum pump, in which method the input current of the control device is limited

Abstract

A control method for an acceleration of a vacuum pump, in particular a turbomolecular pump, having an electric motor and a control device in which, in a first acceleration phase, the input current of the control device increases up to a maximum value Is,max and, in a second acceleration phase, the control device is operated at the maximum value Is,max of the input current.

1 . Control method for an acceleration of a vacuum pump, in particular a turbomolecular pump, having an electric motor and a control device, in which
 in a first acceleration phase, the input current of the control device increases up to a maximum value I s,max  and   in a second acceleration phase, the control device is operated at the maximum value I s,max  of the input current.   
     
     
         2 . Control method of  claim 1 , wherein the rated speed n max  of the vacuum pump is reached at the end of the second acceleration phase. 
     
     
         3 . Control method of  claim 2 , wherein the input current of the control device decreases to an operating value after the second acceleration phase. 
     
     
         4 . Control method of one of  claims 1  to  3 , wherein, in the first acceleration phase, the input current of the control device increases, in particular in a constant manner, to the maximum value I s,max . 
     
     
         5 . Control method of  claim 4 , wherein the input current of the control device reaches the maximum value I s,max  at the end of the first acceleration phase. 
     
     
         6 . Control method of one of  claims 1  to  5 , wherein the motor current is constant during the first acceleration phase, the motor current in particular having a constant maximum value I s,max . 
     
     
         7 . Control method of one of  claims 1  to  6 , wherein the motor current decreases during the second acceleration phase. 
     
     
         8 . Control method of one of  claims 1  to  7 , wherein the motor current decreases to an operating value after the second acceleration phase. 
     
     
         9 . Control method of one of  claims 1  to  8 , wherein the rotational speed of the vacuum pump increases in the first acceleration phase and in the second acceleration phase. 
     
     
         10 . Control method of  claim 9 , wherein the rotational speed of the vacuum pump increases faster in the first acceleration phase than in the second acceleration phase.