Rotor device for a vacuum pump, and vacuum pump

Abstract

A rotor device for a vacuum pump comprises a rotor shaft and at least one rotor element on the rotor shaft. The rotor element contains aluminum, titanium and/or CFRP, while the rotor shaft contains a chromium-nickel steel. This makes it in particular possible to join the at least one rotor element to the rotor shaft at room temperature using a pressing process.

What is claimed is: 
     
         1 . Rotor device for a vacuum pump, comprising
 a rotor shaft and   at least one rotor element arranged on the rotor shaft,   wherein   the at least one rotor element contains aluminum, titanium and/or CFK and the rotor shaft contains chromium-nickel steel.   
     
     
         2 . Rotor device for a vacuum pump of  claim 1 , wherein the at least one rotor element is made of aluminum, an aluminum alloy and/or high-strength aluminum. 
     
     
         3 . Rotor device for a vacuum pump of  claim 1 , wherein the at least one rotor element is made of titanium and/or a titanium alloy. 
     
     
         4 . Rotor device for a vacuum pump of  claim 1 , wherein the at least one rotor element is made of CFK. 
     
     
         5 . Rotor device for a vacuum pump of  claim 1 , wherein the rotor shaft contains a chromium-nickel steel with added sulfur. 
     
     
         6 . Rotor device for a vacuum pump of  claim 1 , wherein the rotor shaft contains a stainless steel alloy. 
     
     
         7 . Rotor device for a vacuum pump of  claim 1 , wherein the material pair is selected such that the at least one rotor element can be fitted on the rotor shaft at room temperature. 
     
     
         8 . Rotor device for a vacuum pump of  claim 1 , wherein a plurality of said rotor elements are arranged in the longitudinal direction of the rotor shaft. 
     
     
         9 . Rotor device for a vacuum pump of  claim 6 , wherein the rotor elements are formed as rotor discs. 
     
     
         10 . Rotor device for a vacuum pump of  claim 8 , further comprising at least one spacer element is arranged between two of the rotor elements. 
     
     
         11 . Vacuum pump, in particular a turbomolecular pump, comprising
 a rotor device for a vacuum pump of  claim 1 ,   the rotor shaft being supported in a pump housing by bearing elements,   a driver connected to the rotor shaft, and   at least one stator element arranged in the pump housing.   
     
     
         12 . Rotor device for a vacuum pump of  claim 6 , wherein the stainless steel alloy is stainless steel X8CrNiS18-9.