Method for evaluating reliability of electrical power measuring device

Abstract

A method is provided for evaluating the reliability of an electrical power measuring device for measuring high-frequency electrical power. To build an evaluation system, the measuring device, together with a reference electrical power measuring device, is arranged between a high-frequency power supply device and an artificial reproduction load, which includes an impedance conversion device and a reference load. Using this system, an uncertainty range of an electrical power measured value measured by the measuring device is calculated, according to a prescribed calculation formula, from the electrical power measured value, and a judgment is made as to whether or not the electrical power measured value measured by the measuring device is within the uncertainty range. If it is within the uncertainty range, the measuring device is evaluated as being reliable, while if it is not within the uncertainty range, the measuring device is evaluated as being unreliable.

1 - 14 . (canceled) 
     
     
         15 . A method of evaluating the reliability of an electrical power measuring device that is connected to a connection point between a high-frequency power supply device and a load having a complex impedance, the method comprising:
 terminating a transmission line of high-frequency electrical power output from the high-frequency power supply device at a dummy load device that emulates the load;   arranging a target electrical power measuring device to be evaluated and a reference electrical power measuring device between the high-frequency power supply device and the dummy load device;   measuring the high-frequency electrical power by the reference electrical power measuring device, thereby obtaining a first measurement value of electrical power;   calculating an uncertainty range of electrical power measurements that is defined by an upper limit and a lower limit, the upper limit being equal to a value obtained by adding the first measurement value of electrical power to a value based on an uncertainty of the reference electrical power measuring device itself, the lower limit being equal to a value obtained by subtracting the value based on the uncertainty of the reference electrical power measuring device itself from the first measurement value of electrical power;   measuring the high-frequency electrical power by the target electrical power measuring device, thereby obtaining a second measurement value of electrical power;   judging whether the second measurement value of electrical power is in the uncertainty range of electrical power measurements; and   evaluating the target electrical power measuring device as being reliable when the second measurement value of electrical power is in the uncertainty range of electrical power measurements.   
     
     
         16 . The method according to  claim 15 , wherein the high-frequency power comprises forward power transmitted from the high-frequency power supply device to the dummy load device. 
     
     
         17 . The method according to  claim 15 , wherein the high-frequency power comprises reflected power transmitted from the dummy load device to the high-frequency power supply device. 
     
     
         18 . The method according to  claim 15 , wherein the dummy load device comprises a variable reactance element, and a plurality of complex impedances are set by adjusting a reactance value of the variable reactance element. 
     
     
         19 . The method according to  claim 15 , wherein the reference electrical power measuring device is provided with a directional coupler to separate the high-frequency power into forward power and reflected power. 
     
     
         20 . The method according to  claim 15 , wherein the target electrical power measuring device measures voltage and current, and calculates, based on the voltage and the measured current, at least one of a phase difference between the voltage and the current, an impedance, a reflection coefficient, forward power and reflected power.