Catadioptric projection objective
Abstract
A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective has a first, refractive objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part including at least one concave mirror for imaging the first Intermediate imaging into a second intermediate image; and a third, refractive objective part for imaging the second intermediate imaging onto the image plane; wherein the projection objective has a maximum lens diameter D max , a maximum image field height Y′, and an image side numerical aperture NA; wherein COMP 1 =D max /(Y′·NA 2 ) and wherein the condition COMP 1 <10 holds.
Claims
exact text as granted — not AI-modified1 . A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprising:
a first, refractive objective part for imaging the pattern provided in the object plane to a first intermediate image; a second objective part including at least one concave mirror for imaging the first intermediate imaging into a second intermediate image; a third, refractive objective part for imaging the second intermediate imaging onto the image plane, wherein: the projection objective has a maximum lens diameter D max , a maximum image field height Y′, and an image side numerical aperture NA; wherein
COMP1= D max /( Y′·NA 2 )
and wherein the following condition holds:
COMP 1 <10.Join the waitlist — get patent alerts
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