Positive Pressure Bernoulli Wand with Coiled Path
Abstract
A wand operating under the Bernoulli principle to pick up, transport and deposit wafers, which continuous pattern imposed into the horizontal surface of the single piece paddle, a variety of openings oriented within the continuous pattern and passing through the horizontal surface of the single piece paddle, a channel with walls having a variety of openings spaced apart from one another and passing through the walls of channel, which may be fit into the continuous pattern and the openings in the walls of channel aligning to some of the variety of openings oriented within the continuous pattern.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1 . A wand comprising:
a top plate; a bottom plate with an underside; a plurality of gas orifices disposed in the bottom-plate underside with a diameter of 0.1-2.0 hundredths of an inch penetrating the bottom plate; and a curved channel associated with the bottom plate and having a path.
2 . The wand of claim 1 wherein the path is smoothly curved.
3 . The wand of claim 2 wherein the path is continuous.
4 . The wand of claim 3 wherein the path does not cross itself.
5 . The wand of claim 4 comprising quartz glass.
6 . The wand of claim 5 wherein the top plate or the bottom plate consist essentially of quartz.
7 . The wand of claim 6 consisting essentially of quartz glass.
8 . The wand of claim 2 comprising quartz glass.
9 . The wand of claim 8 wherein the top plate or the bottom plate consist essentially of quartz.
10 . The wand of claim 9 consisting essentially of quartz glass.
11 . The wand of claim 1 wherein the path does not cross itself.
12 . The wand of claim 11 comprising quartz glass.
13 . The wand of claim 12 wherein the top plate or the bottom plate consist essentially of quartz.
14 . The wand of claim 13 consisting essentially of quartz glass.
15 . The wand of claim 1 comprising quartz glass.
16 . The wand of claim 15 wherein the top plate or the bottom plate consist essentially of quartz.
17 . The wand of claim 11 wherein the path is smoothly curved.
18 . The wand of claim 17 wherein the path is continuous.
19 . A positive pressure Bernoulli-type wand comprising:
a top plate; a bottom plate connected to the top plate and having an underside; a channel disposed into or onto the bottom plate following a path that does not cross itself; and gas orifices penetrating the bottom plate from the underside into the channel.
20 . A positive pressure Bernoulli-type wand comprising:
a quartz top plate; a quartz bottom plate connected to the top plate and having an underside; a channel disposed into or onto the bottom plate following a path that does not cross itself; and gas orifices with a diameter of 0.1-2.0 hundredths of an inch penetrating the bottom plate from the underside into the channel.Join the waitlist — get patent alerts
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