US2016254176A1PendingUtilityA1

Positive Pressure Bernoulli Wand with Coiled Path

Assignee: AZSIMILATE LLCPriority: Feb 27, 2015Filed: Feb 28, 2016Published: Sep 1, 2016
Est. expiryFeb 27, 2035(~8.6 yrs left)· nominal 20-yr term from priority
H10P 72/78H01L 21/6838B25J 15/0616B25J 15/0683B25J 11/0095
25
PatentIndex Score
0
Cited by
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Claims

Abstract

A wand operating under the Bernoulli principle to pick up, transport and deposit wafers, which continuous pattern imposed into the horizontal surface of the single piece paddle, a variety of openings oriented within the continuous pattern and passing through the horizontal surface of the single piece paddle, a channel with walls having a variety of openings spaced apart from one another and passing through the walls of channel, which may be fit into the continuous pattern and the openings in the walls of channel aligning to some of the variety of openings oriented within the continuous pattern.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A wand comprising:
 a top plate;   a bottom plate with an underside;   a plurality of gas orifices disposed in the bottom-plate underside with a diameter of 0.1-2.0 hundredths of an inch penetrating the bottom plate; and   a curved channel associated with the bottom plate and having a path.   
     
     
         2 . The wand of  claim 1  wherein the path is smoothly curved. 
     
     
         3 . The wand of  claim 2  wherein the path is continuous. 
     
     
         4 . The wand of  claim 3  wherein the path does not cross itself. 
     
     
         5 . The wand of  claim 4  comprising quartz glass. 
     
     
         6 . The wand of  claim 5  wherein the top plate or the bottom plate consist essentially of quartz. 
     
     
         7 . The wand of  claim 6  consisting essentially of quartz glass. 
     
     
         8 . The wand of  claim 2  comprising quartz glass. 
     
     
         9 . The wand of  claim 8  wherein the top plate or the bottom plate consist essentially of quartz. 
     
     
         10 . The wand of  claim 9  consisting essentially of quartz glass. 
     
     
         11 . The wand of  claim 1  wherein the path does not cross itself. 
     
     
         12 . The wand of  claim 11  comprising quartz glass. 
     
     
         13 . The wand of  claim 12  wherein the top plate or the bottom plate consist essentially of quartz. 
     
     
         14 . The wand of  claim 13  consisting essentially of quartz glass. 
     
     
         15 . The wand of  claim 1  comprising quartz glass. 
     
     
         16 . The wand of  claim 15  wherein the top plate or the bottom plate consist essentially of quartz. 
     
     
         17 . The wand of  claim 11  wherein the path is smoothly curved. 
     
     
         18 . The wand of  claim 17  wherein the path is continuous. 
     
     
         19 . A positive pressure Bernoulli-type wand comprising:
 a top plate;   a bottom plate connected to the top plate and having an underside;   a channel disposed into or onto the bottom plate following a path that does not cross itself; and   gas orifices penetrating the bottom plate from the underside into the channel.   
     
     
         20 . A positive pressure Bernoulli-type wand comprising:
 a quartz top plate;   a quartz bottom plate connected to the top plate and having an underside;   a channel disposed into or onto the bottom plate following a path that does not cross itself; and   gas orifices with a diameter of 0.1-2.0 hundredths of an inch penetrating the bottom plate from the underside into the channel.

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