Substrate lift assemblies

Abstract

A substrate lift assembly is disclosed. The substrate lift assembly includes a lift frame, a plurality of fingers extending from the frame, the fingers adapted to support a substrate, and a containment ring supported by the lift frame. Process load locks including the substrate lift assembly are disclosed, as are other aspects.

The invention claimed is: 
     
         1 . A substrate lift assembly, comprising:
 a lift frame;   a plurality of fingers extending from the frame, the fingers adapted to support a substrate; and   a containment ring supported by the lift frame.   
     
     
         2 . The substrate lift assembly of  claim 1 , wherein the plurality of fingers comprise horizontally extending fingers adapted to contact and lift a substrate, the horizontally extending fingers positioned below the lift frame. 
     
     
         3 . The substrate lift assembly of  claim 1 , wherein the containment ring comprises a cylindrical hoop extending above a top surface of the lift frame. 
     
     
         4 . The substrate lift assembly of  claim 1 , wherein the containment ring comprises a quartz ring. 
     
     
         5 . The substrate lift assembly of  claim 1 , wherein the containment ring comprises an alumina ring. 
     
     
         6 . The substrate lift assembly of  claim 1 , wherein the containment ring comprises an annular shape. 
     
     
         7 . The substrate lift assembly of  claim 1 , wherein the containment ring rests in a pocket formed in the lift frame. 
     
     
         8 . The substrate lift assembly of  claim 1 , comprising a connection flange of the lift frame. 
     
     
         9 . The substrate lift assembly of  claim 1 , wherein the lift frame includes a hoop portion including a pocket and a connection flange. 
     
     
         10 . The substrate lift assembly of  claim 9 , comprising a riser portion coupled to the connection flange. 
     
     
         11 . The substrate lift assembly of  claim 9 , comprising a lift actuator coupled to a connection flange by a riser portion. 
     
     
         12 . A substrate lift assembly, comprising:
 a lift frame including a hoop portion including a pocket and a connection flange;   a plurality of horizontally extending fingers extending from the frame, the horizontally extending fingers positioned below the lift frame;   a containment ring supported in a pocket formed in the lift frame;   a riser portion coupled to the connection flange; and   a lift actuator operably connected to riser portion.   
     
     
         13 . A substrate lift assembly, comprising:
 a lift frame including a hoop portion with a pocket formed therein, and a connection flange coupled to the hoop portion;   a plurality of fingers extending from the lift frame, the plurality of fingers extending horizontally inward and positioned below the lift frame;   a containment ring comprising a cylindrical hoop of alumina or quartz material supported in the pocket, the containment ring extending above a top surface of the lift frame;   a riser portion coupled to the connection flange; and   a lift actuator operably connected to riser portion.