Polishing device and polishing method

Abstract

A polishing device includes a motor movement mechanism and a second motor that rotates a workpiece. The motor movement mechanism moves the workpiece in a direction tangential to a radially outer circumferential surface of a polishing member and moves the workpiece in a direction orthogonal to a rotational axis of the polishing member.

1 .- 18 . (canceled) 
     
     
         19 . A device that polishes a workpiece, the polishing device comprising:
 a polishing member including a polishing surface that is shaped in conformance with a shape of a portion to be polished of the workpiece; and   a movement mechanism that moves at least one of the workpiece and the polishing member in a direction tangential to a radially outer circumferential surface of the polishing member.   
     
     
         20 . The polishing device according to  claim 19 , wherein the movement mechanism is a first movement mechanism, the polishing device further comprising:
 a second movement mechanism that moves at least one of the workpiece and the polishing member in a direction orthogonal to a rotation axis of the polishing member.   
     
     
         21 . A device that polishes a workpiece, the polishing device comprising:
 a polishing member including a polishing surface that is shaped in conformance with a shape of a portion to be polished of the workpiece; and   a rotation mechanism that rotates at least one of the workpiece and the polishing member.   
     
     
         22 . A device that polishes a workpiece, the polishing device comprising:
 a polishing member including a polishing surface that is shaped in conformance with a shape of a portion to be polished of the workpiece; and   a pressing mechanism that presses at least one of the workpiece and the polishing member in a direction orthogonal to a rotation axis of the polishing member.   
     
     
         23 . The polishing device according to  claim 19 , further comprising:
 a rotation mechanism that rotates at least one of the workpiece and the polishing member.   
     
     
         24 . The polishing device according to  claim 19 , further comprising:
 a pressing mechanism that presses at least one of the workpiece and the polishing member in a direction orthogonal to a rotation axis of the polishing member.   
     
     
         25 . The polishing device according to  claim 19 , further comprising:
 a rotation mechanism that rotates at least one of the workpiece and the polishing member; and   a pressing mechanism that presses at least one of the workpiece and the polishing member in a direction orthogonal to a rotation axis of the polishing member.   
     
     
         26 . The polishing device according to  claim 19 , further comprising:
 a motor that rotates the polishing member from below.   
     
     
         27 . The polishing device according to  claim 19 , further comprising:
 a base including an upper surface, wherein when the polishing member is located on the upper surface, the base is rotated integrally with the polishing member.   
     
     
         28 . The polishing device according to  claim 21 , further comprising:
 a motor that rotates the polishing member from below.   
     
     
         29 . The polishing device according to  claim 22 , further comprising:
 a motor that rotates the polishing member from below.   
     
     
         30 . The polishing device according to  claim 21 , further comprising:
 a base including an upper surface, wherein when the polishing member is located on the upper surface, the base is rotated integrally with the polishing member.   
     
     
         31 . The polishing device according to  claim 22 , further comprising:
 a base including an upper surface, wherein when the polishing member is located on the upper surface, the base is rotated integrally with the polishing member.   
     
     
         32 . The polishing device according to  claim 22 , further comprising:
 a controller that controls driving of the pressing mechanism so that pressure of contact between the workpiece and the polishing member is constant at a predetermined value.   
     
     
         33 . The polishing device according to  claim 22 , further comprising:
 a controller that controls driving of the pressing mechanism so that pressure of the pressing mechanism is adjusted in accordance with an area of contact between the workpiece and the polishing member.   
     
     
         34 . The polishing device according to  claim 19 , further comprising:
 a controller that adjusts a polishing time of the workpiece in accordance with pressure of contact between the workpiece and the polishing member.   
     
     
         35 . The polishing device according to  claim 21 , further comprising:
 a controller that adjusts a polishing time of the workpiece in accordance with pressure of contact between the workpiece and the polishing member.   
     
     
         36 . The polishing device according to  claim 22 , further comprising:
 a controller that adjusts a polishing time of the workpiece in accordance with pressure of contact between the workpiece and the polishing member.   
     
     
         37 . The polishing device according to  claim 19 , further comprising:
 a controller that adjusts a polishing time of the workpiece in accordance with an area of contact between the workpiece and the polishing member.   
     
     
         38 . The polishing device according to  claim 21 , further comprising:
 a controller that adjusts a polishing time of the workpiece in accordance with an area of contact between the workpiece and the polishing member.   
     
     
         39 . The polishing device according to  claim 22 , further comprising:
 a controller that adjusts a polishing time of the workpiece in accordance with an area of contact between the workpiece and the polishing member.   
     
     
         40 . The polishing device according to  claim 19 , further comprising:
 a controller that adjusts a polishing time of the workpiece in accordance with a shape of the workpiece.   
     
     
         41 . The polishing device according to  claim 21 , further comprising:
 a controller that adjusts a polishing time of the workpiece in accordance with a shape of the workpiece.   
     
     
         42 . The polishing device according to  claim 22 , further comprising:
 a controller that adjusts a polishing time of the workpiece in accordance with a shape of the workpiece.   
     
     
         43 . The polishing device according to  claim 19 , further comprising:
 a controller that changes a moving speed of the workpiece or the polishing member in the tangential direction with the movement mechanism in accordance with the pressure of contact between the workpiece and the polishing member to adjust a polishing time of the workpiece.   
     
     
         44 . The polishing device according to  claim 21 , further comprising:
 a controller that changes a rotation speed of the workpiece or the polishing member with the rotation mechanism in accordance with pressure of contact between the workpiece and the polishing member to adjust a polishing time of the workpiece.   
     
     
         45 . The polishing device according to  claim 19 , further comprising:
 a controller that changes a moving speed of the workpiece or the polishing member in the tangential direction with the movement mechanism in accordance with an area of contact between the workpiece and the polishing member to adjust a polishing time of the workpiece.   
     
     
         46 . The polishing device according to  claim 21 , further comprising:
 a controller that changes a rotation speed of the workpiece or the polishing member with the rotation mechanism in accordance with an area of contact between the workpiece and the polishing member to adjust a polishing time of the workpiece.   
     
     
         47 . The polishing device according to  claim 19 , further comprising:
 a controller that changes a moving speed of the workpiece or the polishing member in the tangential direction with the movement mechanism in accordance with a shape of the workpiece to adjust a polishing time of the workpiece.   
     
     
         48 . The polishing device according to  claim 21 , further comprising:
 a controller that changes a rotation speed of the workpiece or the polishing member with the rotation mechanism in accordance with a shape of the workpiece to adjust a polishing time of the workpiece.