US2016211161A1PendingUtilityA1

Constrained die adhesion cure process

Assignee: GLOBALFOUNDRIES INCPriority: Jun 5, 2013Filed: Mar 30, 2016Published: Jul 21, 2016
Est. expiryJun 5, 2033(~6.8 yrs left)· nominal 20-yr term from priority
H10P 72/0428H10W 74/15H10W 72/07178H10P 72/76H10W 72/0711Y10T29/49998Y10T29/49826H01L 21/67092H01L 21/687
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Claims

Abstract

A clamping apparatus applies a force to a workpiece during processing. The clamping apparatus includes a base defining a work area configured to receive a joined structure having multiple elements. The base defines a recess in the work area. An adjustable mechanism is configured to releasably couple to the base and apply a adjustable downward force to the joined structure to bend the joined structure downwardly into the recess during a process. A resilient plunger is part of the adjustable mechanism. The resilient plunger extends downwardly from a top plate of the adjustable mechanism, and the resilient plunger is configured to contact a top of a first element of the joined structure to apply the downward force.

Claims

exact text as granted — not AI-modified
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         12 . A method of manufacturing a clamping apparatus for applying a force to a workpiece during processing, comprising the steps of:
 defining a work area in a base, the work area being configured to receive a joined structure having multiple elements;   creating a recess in the work area of the base; and   attaching a resilient plunger extending downwardly from a top plate of an adjustable mechanism, the resilient plunger being configured to contact a top of a first element of the joined structure to apply an adjustable downward force, the adjustable mechanism being releasably couplable to the base for applying the adjustable downward force to the joined structure to bend the joined structure downwardly into the recess during a process.   
     
     
         13 . The method of  claim 12 , wherein the resilient plunger includes an end plate coupled to a distal end thereof. 
     
     
         14 . The method of  claim 12 , wherein the plunger includes a contoured end plate coupled to a distal end thereof, the end plate configured to contact the top of the first element of the joined structure. 
     
     
         15 . The method of  claim 12 , wherein the plunger includes a convex or a concave end plate coupled to a distal end thereof, the end plate configured to contact the top of the first element of the joined structure. 
     
     
         16 . The method of  claim 12 , wherein the plunger includes a dome shaped end plate coupled to a distal end thereof, the end plate configured to contact the top of the first element of the joined structure. 
     
     
         17 . The method of  claim 12 , wherein the adjustable mechanism and the resilient plunger are configured to selectively apply and release the downward force to the joined structure. 
     
     
         18 . The method of  claim 12 , wherein the adjustable mechanism includes a locked position wherein side flanges attached to opposite ends of the top plate are releasable coupled to mating ledges of the base to apply the adjustable downward force to the joined structure, and the adjustable mechanism includes an unlocked position wherein the side flanges are not coupled to the ledges. 
     
     
         19 . A method of applying a force to a workpiece during processing, comprising:
 positioning a joined structure having multiple elements in a work area of a base, the base defining a recess in the work area;   releasably coupling an adjustable mechanism to the base and to apply a adjustable downward force to the joined structure to bend the joined structure downwardly into the recess during a process; and   applying the downward force to a top of a first element of the joined structure using a resilient plunger being part of the adjustable mechanism, the resilient plunger extending downwardly from a top plate of the adjustable mechanism to contact the top of the first element apply the downward force.   
     
     
         20 . The method of  claim 19 , further comprising:
 locking the adjustable mechanism when side flanges attached to opposite ends of the top plate are releasable coupled to mating ledges of the base to apply the adjustable downward force to the joined structure; and   unlocking the adjustable mechanism when the side flanges are not coupled to the ledges.

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