Brushless rotary plasma electrode structure and film coating system

Abstract

A brushless rotary plasma electrode structure is disclosed. The brushless rotary plasma electrode structure includes a main body, a plurality of guided portions, and a plurality of conducting-through members. The main body further includes a plurality of electrode portions that have a first salient portion furnished at the periphery thereof. The guided portion is penetrated through the electrode portion. Each of the conducting-through members further includes a second salient portion. There is an internal in both the first salient portion and the second salient portion. In addition, a film coating system is also provided.

What is claimed is: 
     
         1 . A brushless rotary plasma electrode structure, comprising:
 A main body being rotating with respect to an axis further comprising a plurality of electrode portions that are disposed at intervals, and the electrode portions have a first salient portion furnished at the periphery thereof;   A plurality of guided portions penetrating through those electrode portions; and   A plurality of conducting-through members, each of them further comprising a second salient portion having a first interval between thereof and its corresponding the first salient portion.   
     
     
         2 . The brushless rotary plasma electrode structure in  claim 1 , further comprising a RF generator coupling with the corresponding conducting-through member. 
     
     
         3 . The brushless rotary plasma electrode structure in  claim 1 , further comprising an isolation portion positioned between the electrode portions. 
     
     
         4 . The brushless rotary plasma electrode structure in  claim 1 , wherein one end of each of the conducting-through members appears in fin shape, and the periphery of each of the electrode portions also appears in fin shape; the second salient portion is positioned between the two corresponding first salient portions. 
     
     
         5 . The brushless rotary plasma electrode structure in  claim 1 , wherein one end of each of the conducting-through members appears in fin shape, and the periphery of each of the electrode portions also appears in fin shape; the first salient portion is positioned between the two corresponding second salient portions. 
     
     
         6 . The brushless rotary plasma electrode structure in  claim 1 , wherein each of the conducting-through members is positioned between the two corresponding first salient portions, and each of the first salient portion covers a portion of the conducting-through member; the first salient portion does not contact with the conducting-through member. 
     
     
         7 . The brushless rotary plasma electrode structure in  claim 1 , wherein one end of each of the conducting-through member being appearing in   shape has its second salient portion cover a portion of the first salient portion, and the second salient portion does not contact the first salient portion. 
     
     
         8 . The brushless rotary plasma electrode structure in  claim 1 , wherein one end of each of the conducting-through member being appearing in   shape, the electrode portion is positioned between the two corresponding second salient portions; each of the second salient portion covers a portion of the electrode portion, and the second salient portion does not contact with the electrode portion. 
     
     
         9 . The brushless rotary plasma electrode structure in  claim 1 , wherein there is a second interval between each of the conducting-through member and the corresponding electrode portion, and the dimension of the second interval is greater than 2 mm. 
     
     
         10 . The brushless rotary plasma electrode structure in  claim 1 , wherein the first salient portion is formed by putting a ring-shaped plate on the electrode portion. 
     
     
         11 . The brushless rotary plasma electrode structure in  claim 1 , wherein the first salient portion is formed by mechanically working by channel milling. 
     
     
         12 . The brushless rotary plasma electrode structure in  claim 1 , wherein the dimension of the first interval is less than 2 mm. 
     
     
         13 . A film coating system, comprising:
 A brushless rotary plasma electrode structure, further comprising:
 A main body being rotating with respect to an axis further comprising a plurality of electrode portions that are disposed at intervals, and the electrode portions have a first salient portion furnished at the periphery thereof; 
 A plurality of guided portions penetrating through those electrode portions; and 
 A plurality of conducting-through members, each of them further comprising a second salient portion having a first interval between thereof and its corresponding first salient portion. 
   
     
     
         14 . The brushless rotary plasma electrode structure in  claim 13 , further comprising a RF generator coupling with the corresponding conducting-through member. 
     
     
         15 . The brushless rotary plasma electrode structure in  claim 13 , further comprising an isolation portion positioned between the electrode portions. 
     
     
         16 . The brushless rotary plasma electrode structure in  claim 13 , wherein one end of each of the conducting-through members appears in fin shape, and the periphery of each of the electrode portions also appears in fin shape; the second salient portion is positioned between the two corresponding first salient portions. 
     
     
         17 . The brushless rotary plasma electrode structure in  claim 13 , wherein one end of each of the conducting-through members appears in fin shape, and the periphery of each of the electrode portions also appears in fin shape; the first salient portion is positioned between the two corresponding second salient portions. 
     
     
         18 . The brushless rotary plasma electrode structure in  claim 13 , wherein each of the conducting-through members is positioned between the two corresponding first salient portions, and each of the first salient portion covers a portion of the conducting-through member; the first salient portion does not contact with the conducting-through member. 
     
     
         19 . The brushless rotary plasma electrode structure in  claim 1 , wherein one end of each of the conducting-through member being appearing in   shape has its second salient portion cover a portion of the first salient portion, and the second salient portion does not contact the first salient portion. 
     
     
         20 . The brushless rotary plasma electrode structure in  claim 13 , wherein one end of each of the conducting-through member being appearing in   shape, the electrode portion is positioned between the two corresponding second salient portions; each of the second salient portion covers a portion of the electrode portion, and the second salient portion does not contact with the electrode portion. 
     
     
         21 . The brushless rotary plasma electrode structure in  claim 13 , wherein there is a second interval between each of the conducting-through member and the corresponding electrode portion, and the dimension of the second interval is greater than 2 mm. 
     
     
         22 . The brushless rotary plasma electrode structure in  claim 13 , wherein the first salient portion is formed by putting a ring-shaped plate on the electrode portion. 
     
     
         23 . The brushless rotary plasma electrode structure in  claim 13 , wherein the first salient portion is formed by mechanically working by channel milling. 
     
     
         24 . The brushless rotary plasma electrode structure in  claim 13 , wherein the dimension of the first interval is less than 2 mm.