Apparatus for producing aligned carbon nanotube aggregates

Abstract

An apparatus of the present invention for producing aligned carbon nanotube aggregates is an apparatus for producing aligned carbon nanotube aggregates, the apparatus being configured to grow the aligned carbon nanotube aggregate by: causing a catalyst formed on a surface of a substrate to be surrounded by a reducing gas environment constituted by a reducing gas; heating at least either the catalyst or the reducing gas; causing the catalyst to be surrounded by a raw material gas environment constituted by a raw material gas; and heating at least either the catalyst or the raw material gas, at least either an apparatus component exposed to the reducing gas or an apparatus component exposed to the raw material gas being made from a heat-resistant alloy, and having a surface plated with molten aluminum.

1 . An apparatus for producing aligned carbon nanotube aggregates,
 the apparatus being configured to grow the aligned carbon nanotube aggregate by:   causing a catalyst formed on a surface of a substrate to be surrounded by a reducing gas environment constituted by a reducing gas;   heating at least either the catalyst or the reducing gas;   causing the catalyst to be surrounded by a raw material gas environment constituted by a raw material gas; and   heating at least either the catalyst or the raw material gas,   at least either an apparatus component exposed to the reducing gas, or an apparatus component exposed to the raw material gas being made from a heat-resistant alloy that comprises at least one of heat-resistant steel, stainless steel, or nickel-based alloys, and having a surface polished so as to have an arithmetic average roughness Ra equal to or smaller than 2 μm,   the apparatus comprising:   a formation unit for causing the catalyst to be surrounded by the reducing gas environment constituted by the reducing gas, and heating at least either the catalyst or the reducing gas;   a growth unit for growing the aligned carbon nanotube aggregate by causing the catalyst to be surrounded by the raw material gas environment constituted by the raw material gas, and heating at least either the catalyst or the raw material gas; and   a transfer unit for transferring the substrate at least from the formation unit to the growth unit,   the formation unit including a formation furnace in which the reducing gas is retained, a reducing gas ejection section for ejecting the reducing gas, and a heater for heating at least either the catalyst or the reducing gas,   the growth unit including a growth furnace in which the raw material gas is retained, a raw material gas ejection section for ejecting the raw material gas, and a heater for heating at least either the catalyst or the raw material gas,   the transfer unit including a mesh belt and a belt driven section,   one of the apparatus components which have been polished being the growth furnace, in which an environment of high-carbon concentration is retained, the environment of high-carbon concentration being an environment in which a proportion of the raw material gas to a total flow is approximately 2% to 20%.