Integrated circuits with electronic fuse structures

Abstract

Integrated circuits including electronic fuse structures are disclosed. In some examples, the electronic fuse structure includes a fuse part and first and second pre-heating lines positioned generally parallel to and co-planar with the fuse part, and electrically connected with the fuse part. The electronic fuse structure also includes a cathode physically and electrically connected to the first pre-heating line and an anode physically and electrically connected to the second pre-heating line.

What is claimed is: 
     
         1 . An electronic fuse structure comprising:
 a fuse part;   first and second pre-heating lines positioned generally parallel to and co-planar with the fuse part, and electrically connected with the fuse part;   a cathode physically and electrically connected to the first pre-heating line; and   an anode physically and electrically connected to the second pre-heating line.   
     
     
         2 . The electronic fuse structure of  claim 1 , wherein each of the first and second pre-heating lines each has a width that is greater than a width of the fuse part. 
     
     
         3 . The electronic fuse structure of  claim 1 , further comprising first and second connecting portions physically and electrically connecting the first and second pre-heating lines, respectively, to the fuse part. 
     
     
         4 . The electronic fuse structure of  claim 3 , wherein the first and second connecting portions are oriented generally perpendicular to the first and second pre-heating lines and the fuse part. 
     
     
         5 . The electronic fuse structure of  claim 1 , wherein the fuse part and the first and second pre-heating lines comprise a conductive material. 
     
     
         6 . The electronic fuse structure of  claim 5 , wherein the conductive material comprises a silicon material, a metal material, or a metal silicide material. 
     
     
         7 . The electronic fuse structure of  claim 1 , further comprising third and fourth pre-heating lines positioned generally parallel to and co-planar with the fuse part, and electrically connected with the fuse part. 
     
     
         8 . The electronic fuse structure of  claim 7 , wherein the first and second pre-heating lines are not coplanar with the third and fourth pre-heating lines. 
     
     
         9 . The electronic fuse structure of  claim 7 , further comprising third and fourth connecting portions physically and electrically connecting the third and fourth pre-heating lines, respectively, to the fuse part. 
     
     
         10 . The electronic fuse structure of  claim 9 , wherein each of the third and fourth connecting portions comprise a via structure. 
     
     
         11 . The electronic fuse structure of  claim 9 , wherein the third and fourth connecting portions are oriented generally perpendicular to the first, second, third, and fourth pre-heating lines and the fuse part. 
     
     
         12 . The electronic fuse structure of  claim 7 , wherein each of the third and fourth pre-heating lines has a width that is greater than a width of the fuse part. 
     
     
         13 . The electronic fuse structure of  claim 7 , wherein each of the third and fourth pre-heating lines overlap an entirety of the fuse part. 
     
     
         14 . The electronic fuse structure of  claim 7 , wherein the third and fourth pre-heating lines and the fuse part overlap one another at a central portion of the fuse part. 
     
     
         15 . An integrated circuit structure comprising:
 a semiconductor substrate;   an active circuit device disposed on and/or in the semiconductor substrate; and   a first wiring level overlying the active circuit device, wherein the first wiring level comprises an electronic fuse structure that comprises:
 a fuse part; 
 first and second pre-heating lines positioned generally parallel to and co-planar with the fuse part and electrically connected with the fuse part; 
 a cathode physically and electrically connected to the first pre-heating line; and 
 an anode physically and electrically connected to the second pre-heating line. 
   
     
     
         16 . The integrated circuit structure of  claim 15 , wherein each of the first and second pre-heating lines has a width that is greater than a width of the fuse part. 
     
     
         17 . The integrated circuit structure of  claim 15 , further comprising first and second connecting portions physically and electrically connecting the first and second pre-heating lines, respectively, to the fuse part. 
     
     
         18 . The integrated circuit structure of  claim 15 , further comprising third and fourth pre-heating lines positioned generally parallel to and co-planar with the fuse part, and electrically connected with the fuse part, 
     
     
         19 . The integrated circuit structure of  claim 18 , wherein the first pre-heating line is positioned in a second wiring level above the first wiring level, and wherein the third pre-heating line is position in a third wiring level below the first wiring level. 
     
     
         20 . An electronic fuse structure of an integrated circuit comprising:
 a fuse part positioned in a first wiring level of the integrated circuit;   first and second pre-heating lines positioned generally parallel to and co-planar with the fuse part in the first wiring level, and electrically connected with the fuse part, wherein each of the first and second pre-heating lines has a width that is greater than a width of the fuse part;   first and second connecting portions physically and electrically connecting the first and second pre-heating lines in the first wiring level, respectively, to the fuse part, wherein the first and second connecting portions are oriented generally perpendicular to the first and second pre-heating lines and the fuse part;   third and fourth pre-heating lines positioned generally parallel to and co-planar with the fuse part and positioned in second and third wiring levels of the integrated circuit, respectively, and electrically connected with the fuse part, wherein the first and second pre-heating lines are not coplanar with the third and fourth pre-heating lines, and wherein each of the third and fourth pre-heating lines has a width that is greater than the fuse part;   third and fourth connecting portions physically and electrically connecting the third and fourth pre-heating lines, respectively, in the second and third wiring levels of the integrated circuit, respectively, to the fuse part, wherein the third and fourth connecting portions are oriented generally perpendicular to the first, second, third, and fourth pre-heating lines and the fuse part;   a cathode physically and electrically connected to the third pre-heating line; and   an anode physically and electrically connected to the fourth pre-heating line.