Plasma processing apparatus

Abstract

A plasma processing apparatus, comprising at least one sealed chamber ( 2 ), a vacuum device and working gas feed device in communication with the sealed chamber ( 2 ), and a plasma processing device and a garment support mechanism ( 5 ) arranged inside the sealed chamber ( 2 ); the plasma processing device comprises at least two parallel spaced electrode plates ( 41 ), and the garment support mechanism ( 5 ) comprises a support frame ( 51 ) provided between every two adjacent electrode plates ( 41 ) and used for supporting at least one garment ( 1 ) and fully opening the garment ( 1 ). The present plasma processing apparatus simultaneously plasma processes a plurality of garments ( 1 ) on a plurality of support frames ( 51 ); according to requirements, the necessary working gas is fed and imparts the garments ( 1 ) with different properties; the apparatus allows processing to be done in bulk, improves plasma garment processing speed, and is suitable for use in industrial processing.

1 . A garment plasma treatment apparatus, comprising at least one sealed chamber ( 2 ), a vacuum device connected with the sealed chamber ( 2 ) for vacuumizing the sealed chamber ( 2 ) and a working gas feed device used for feeding the sealed chamber ( 2 ) working gas, and a plasma treatment device and a garment supporting mechanism ( 5 ) provided inside the sealed chamber ( 2 ), wherein the plasma treatment device includes at least two electrode plates which are parallel spaced with each other, the garment supporting mechanism ( 5 ) includes a garment supporting frame ( 51 ) provided between every two adjacent electrode plates ( 41 ) for supporting and fully unfolding at least one garment ( 1 ). 
     
     
         2 . The garment plasma treatment apparatus according to  claim 1 , wherein the garment supporting mechanism ( 5 ) further includes a movable car holder ( 52 ) connected to a bottom end of the garment supporting frames ( 51 ), an opening ( 25 ) via which the garment supporting mechanism moves into and out from the sealed chamber ( 2 ) and a sealed door for opening and closing the opening ( 25 ) are defined on one side face of the sealed chamber ( 2 ), the plasma treatment device further includes an electrode frame positioned in the sealed chamber ( 2 ), the electrode frame includes four rod-shaped support portions ( 43 ) vertically supported at a bottom of the sealed chamber ( 2 ) and an install portion ( 44 ) defined on a topside of the sealed chamber ( 2 ) and vertically connected to top ends of the four support portions ( 43 ), the electrode plates ( 41 ) are vertically positioned, a top end of each electrode plate ( 41 ) is fixed on the install portion ( 44 ) respectively, one side of each electrode plate ( 41 ) is opposite arranged to the opening ( 25 ). 
     
     
         3 . The garment plasma treatment apparatus according to  claim 2 , wherein the movable car holder ( 52 ) is connected to at least one garment supporting frame ( 51 ), a bottom end of the electrode plate ( 41 ) is higher than the movable car holder ( 52 ). 
     
     
         4 . The garment plasma treatment apparatus according to  claim 3 , wherein a slide rail ( 26 ) is provided at the bottom of the sealed chamber ( 2 ) for the movable car holder ( 52 ) to move along a direction parallel to the electrode plate ( 41 ), wherein the direction garment supporting frame ( 51 ) unfolding the garments ( 1 ) is parallel to the direction the movable car holder ( 52 ) moves along. 
     
     
         5 . The garment plasma treatment apparatus according to  claim 4 , wherein the garment plasma treatment apparatus includes a stirring mechanism connected to the movable car holder ( 52 ) for moving the garment supporting mechanism ( 5 ) along a direction parallel to the electrode plate ( 41 ), and a control device ( 7 ) for controlling the vacuum device, the plasma treatment device and the stirring mechanism. 
     
     
         6 . The garment plasma treatment apparatus according to  claim 5 , wherein the stirring mechanism includes a back-and-forth stirring mechanism used for moving the garment supporting mechanism ( 5 ) along a direction towards and away from a space between the electrode plates ( 41 ), the back-and-forth stirring mechanism comprises a first driving unit, and a gear wheel ( 61 ) arranged at the bottom of the sealed chamber ( 2 ) and driven by the first driving unit, and a rack ( 53 ) arranged on the movable car holder ( 52 ) and engaged with the gear wheel ( 61 ). 
     
     
         7 . The garment plasma treatment apparatus according to  claim 5 , wherein the stirring mechanism includes an up-and-down stirring mechanism connected to the slide rail ( 26 ) for moving the garment supporting mechanism ( 5 ) up-and-down, a rotation rod is arranged at both ends of the slide rail ( 26 ), respectively, one end of the rotation rod is articulated with the slide rail ( 26 ), and the other end of the rotation rod is articulated at the bottom of the sealed chamber ( 2 ), the slide rail ( 26 ) is rotatably connected to the bottom of the sealed chamber ( 2 ) via the rotation rod, the up-and-down stirring mechanism comprises a second driving unit and a cam provided under the slide rail ( 26 ) and driven by the second driving unit, a contour of the cam contacts with the slide rail ( 26 ), a rotation of the cam pushes the slide rail ( 26 ) to rotate around the bottom of the sealed chamber ( 2 ). 
     
     
         8 . The garment plasma treatment apparatus according to  claim 1 , wherein the vacuum device includes one main pump connected to the sealed chamber with a 8×10 −1  Pa vacuum degree, and one preliminary pump connected to the main pump with a 2×10 2  Pa vacuum degree, the vacuum device further includes a pneumatic control valve arranged between the sealed chamber ( 2 ) and the main pump. 
     
     
         9 . The garment plasma treatment apparatus according to  claim 1 , wherein the garment plasma treatment apparatus includes a first sealed chamber ( 21 ) and a second sealed chamber ( 22 ) connected to the vacuum device respectively. 
     
     
         10 . The garment plasma treatment apparatus according to  claim 1 , wherein the working gas is air, oxygen, nitrogen, argon or a mixed gas of the argon and organic gas, wherein the organic gas is organosilanes, hydrofluoroalkanes, organophosphorus compounds or gasified alkenes.