Plasma generating device with moving carousel and method of use

Abstract

One possible embodiment of the invention could be a plasma reactor chamber and method of operating same wherein the plasma reactor chamber comprises a set of chamber walls and a door that when closed seals the plasma reactor chamber air-tight; one or more RF electrodes with at least one RF electrode being a power RF electrode; and a structure that moves one or more specimens proximate to the one or more RF electrodes.

What is claimed: 
     
         1 . A method of operating a plasma reactor chamber comprising the following steps but not necessarily in the order shown:
 (a) providing a plasma reactor chamber that is sealable and air-tight when sealed, the plasma reactor chamber containing one or more RF electrodes, polytetrafluoroethylene at least partially covering at least one of the one or more RF electrodes;   (b) removing the air from plasma reactor chamber so it can be replaced with a plasma creating gas;   (c) energizing the one or more RF electrodes to energize the polytetrafluoroethylene; and   (d) forming a plasma field proximate to the one or more RF electrodes.   
     
     
         2 . The method of  claim 1  further comprising a step of forming a gas from energizing polytetrafluoroethylene that gas providing deposition upon one or more specimens placed into the plasma reactor chamber. 
     
     
         3 . The method of  claim 1  further comprising a step of using a gas formed from the energizing of polytetrafluoroethylene for deposition. 
     
     
         4 . The method of  claim 1  further comprising a step of forming a gas from energizing polytetrafluoroethylene that gas supporting plasma creation. 
     
     
         5 . The method of  claim 1  further comprising a step of using a gas formed from the energizing polytetrafluoroethylene for plasma creation. 
     
     
         6 . The method of  claim 1  wherein the energizing of polytetrafluoroethylene forms fluorine gas. 
     
     
         7 . The method of  claim 1  further comprising a step of introducing the one or more specimens to a gas created through the energization of the polytetrafluoroethylene. 
     
     
         8 . The method of  claim 1  further comprising a step of introducing the one or more specimens to the plasma field as formed by at least by the gas created through the energization of the polytetrafluoroethylene. 
     
     
         9 . The method of  claim 1  wherein the providing a plasma reactor chamber further comprises a structure that can move one or more specimens through a gas created through the energization of the polytetrafluoroethylene. 
     
     
         10 . The method of  claim 1  further comprising a step of moving one or more specimens proximate to the RF electrodes further comprises a step of rotating the one or more specimens in a non-horizontal orientation through a plasma field as formed by at least by the gas created through the energization of the polytetrafluoroethylene. 
     
     
         11 . The method of  claim 10  wherein the step of rotating one or more specimens further compromises a step of moving a structure for supporting specimens through the plasma field, the plasma field created through the energization of the polytetrafluoroethylene. 
     
     
         12 . The method of  claim 11  wherein the step of moving the structure further comprises a step of rotating the structure proximate the one or more RF antenna. 
     
     
         13 . The method of  claim 11  wherein the step of moving the structure further comprises a step of rotating the structure in a non-horizontal orientation to move one or more specimens through a gas created through the energization of the polytetrafluoroethylene. 
     
     
         14 . A plasma reactor chamber comprising:
 (a) a set of chamber walls and a door that when closed seals the plasma reactor chamber air-tight;   (b) one or more RF electrodes with at least one RF electrode being a power RF electrode, the one or more RF electrodes upon activation emits RF electromagnetic radiation;   (c) polytetrafluoroethylene at least partially covering one of the one or more RF electrodes;   
       wherein the emitted RF electromagnetic radiation energizes the polytetrafluoroethylene to emit a gas within the plasma reactor chamber. 
     
     
         15 . The plasma reactor chamber of  claim 14  further comprises a structure that moves one or more specimens in a non-horizontal orientation proximate to the one or more RF electrodes; 
     
     
         16 . The plasma reactor chamber of  claim 14  herein the gas is fluorine. 
     
     
         17 . The plasma reactor chamber of  claim 14  wherein the gas creates a plasma field within the chamber. 
     
     
         18 . The plasma reactor chamber of  claim 16  wherein the movement of one or more specimens causes the one or more specimens to pass through the plasma field created by the gas. 
     
     
         19 . The plasma reactor chamber of  claim 14  wherein the structure rotates within the plasma reactor chamber so that a portion of the structure rotates past the one or more RF electrodes. 
     
     
         20 . The plasma reactor chamber of  claim 14  wherein the structure is movably mounted in a non-horizontal orientation to remainder of the plasma reactor chamber.