Vapor deposition mask, vapor deposition mask preparation body, method for producing vapor deposition mask, and method for producing organic semiconductor element

Abstract

There are provided a vapor deposition mask capable of satisfying both high definition and lightweight in upsizing and forming a vapor deposition pattern with high definition while securing strength, a method for producing a vapor deposition mask and a vapor deposition mask preparation body capable of simply producing the vapor deposition mask, and furthermore, a method for producing an organic semiconductor element capable of producing an organic semiconductor element with high definition. A metal mask 10 in which a plurality of slits 15 are provided and a resin mask 20 are stacked. Openings 25 required for composing a plurality of screens are provided in the resin mask 20 . The openings 25 correspond to a pattern to be produced by vapor deposition. Each of the slits 15 is provided at a position of overlapping with an entirety of at least one screen.

1 . A vapor deposition mask for simultaneously forming vapor deposition patterns for a plurality of screens, comprising:
 a metal mask in which a plurality of slits are provided; and a resin mask, the metal mask and the resin mask being stacked, wherein   openings required for composing the plurality of screens are provided in the resin mask,   the openings correspond to a pattern to be produced by vapor deposition, and   each of the slits is provided at a position of overlapping with an entirety of at least one screen.   
     
     
         2 . A vapor deposition mask comprising: a metal mask in which one through hole is provided; and a resin mask in which a plurality of openings corresponding to a pattern to be produced by vapor deposition are provided, the metal mask and the resin mask being stacked, wherein
 all of the plurality of openings are provided at a position of overlapping with the one through hole.   
     
     
         3 . A vapor deposition mask preparation body for obtaining a vapor deposition mask including: a metal mask in which a plurality of slits are provided; and a resin mask, the metal mask and the resin mask being stacked, openings required for composing a plurality of screens provided in the resin mask, the openings corresponding to a pattern to be produced by vapor deposition, each of the slits provided at a position of overlapping with an entirety of at least one screen, wherein
 the metal mask in which the slits are provided is stacked on one surface of a resin plate, and   each of the slits is provided at a position of overlapping with an entirety of the openings which compose one screen and are finally provided in the resin plate.   
     
     
         4 . A vapor deposition mask preparation body for obtaining a vapor deposition mask including: a metal mask in which one through hole is provided; and a resin mask in which a plurality of openings corresponding to a pattern to be produced by vapor deposition are provided, the metal mask and the resin mask being stacked, all of the plurality of openings provided at a position of overlapping with the one through hole, wherein
 the metal mask in which slits are provided is stacked on one surface of a resin plate, and   each of the one through hole is provided at a position of overlapping with an entirety s of the openings which are finally provided in the resin plate.   
     
     
         5 . A method for producing a vapor deposition mask, comprising:
 a step of preparing a resin plate-equipped metal mask which includes a metal mask in which a plurality of slits are provided and a resin plate stacked with each other; and   a resin mask forming step of forming openings required for composing a plurality of screens in the resin plate by irradiation with laser from the metal mask side, wherein   as the metal mask, a metal mask in which the slit is provided at a position of overlapping with an entirety of at least one screen out of the plurality of screens is used.   
     
     
         6 . A method for producing a vapor deposition mask, comprising:
 a step of preparing a resin plate-equipped metal mask which includes a metal mask in which one through hole is provided and a resin plate stacked with each other; and   a resin mask forming step of forming a plurality of openings at a position of overlapping with the one through hole in the resin plate by irradiation of laser from the metal mask side.   
     
     
         7 . The method for producing a vapor deposition mask according to  claim 5 , wherein after fixing the resin plate-equipped metal mask onto a frame, the resin mask forming step is performed. 
     
     
         8 . A method for producing an organic semiconductor element, comprising
 a step of forming a vapor deposition pattern on a vapor deposition target by using a frame-equipped vapor deposition mask in which a vapor deposition mask is fixed to a frame, wherein   the vapor deposition mask which is fixed to the frame in the step of forming the vapor deposition pattern is   a vapor deposition mask including: a metal mask in which a plurality of slits are provided; and a resin mask, the metal mask and the resin mask being stacked,   openings required for composing a plurality of screens are provided in the resin mask,   the openings correspond to a pattern to be produced by vapor deposition, and   each of the slits is provided at a position of overlapping with an entirety of at least one screen.   
     
     
         9 . A method for producing an organic semiconductor element, comprising
 a step of forming a vapor deposition pattern on a vapor deposition target by using a frame-equipped vapor deposition mask in which a vapor deposition mask is fixed to a frame, wherein   the vapor deposition mask which is fixed to the frame in the step of forming the vapor deposition pattern is   a vapor deposition mask including: a metal mask in which one through hole is provided; and a resin mask in which a plurality of openings corresponding to a pattern to be produced by vapor deposition are provided, the metal mask and the resin mask being stacked, and   all of the plurality of openings are provided at a position of overlapping with the one through hole.   
     
     
         10 . The method for producing a vapor deposition mask according to  claim 6 , wherein after fixing the resin plate-equipped metal mask onto a frame, the resin mask forming step is performed.