Polishing tool and processing method for member

Abstract

The present invention relates to a polishing method using a polishing tool provided with a polishing pad including a polishing surface shaped in conformance with a curved surface of an object to be polished to efficiently and uniformly polish the curved surface of the object. A polishing tool of the present invention is provided with a polishing pad including a polishing surface shaped in conformance with a curved surface of an object to be polished to uniformly contact the curved surface of the object. The polishing pad preferably has a Shore A hardness of 5 or greater. A polishing method of the present invention uses a polishing tool including a polishing surface shaped in conformance with a curved surface of an object to be polished to uniformly contact the curved surface of the object and polish the curved surface of the object.

1 . A polishing tool comprising a polishing pad including a polishing surface shaped in conformance with a curved surface of an object to be polished to uniformly contact the curved surface of the object. 
     
     
         2 . The polishing tool according to  claim 1 , wherein the polishing tool is disk-shaped and has a diameter of 20 mm or larger. 
     
     
         3 . The polishing tool according to  claim 1 , wherein the polishing pad has a Shore A hardness of 5 or greater. 
     
     
         4 . A processing method comprising:
 by using a polishing tool provided with a polishing pad including a polishing surface shaped in conformance with a curved surface of an object to be polished to uniformly contact the curved surface of the object, pressing the polishing pad against the curved surface of the object; and   polishing the curved surface of the object by rotating the polishing tool while feeding a polishing liquid to a portion of contact between the polishing pad and the object.   
     
     
         5 . The processing method according to  claim 4 , wherein the polishing tool is disk-shaped and has a diameter of 20 mm or larger, the method further comprising controlling a rotation speed of the polishing tool and reducing centrifugal force acting on the polishing surface to reduce dispersion of the polishing liquid. 
     
     
         6 . The processing method according to  claim 4 , wherein the polishing pad has a surface including abrasive grains. 
     
     
         7 . A method for polishing an object with a polishing tool, the method comprising:
 attaching the polishing tool and/or the object to be polished to a polishing device that includes a pressure controller;   measuring a contact pressure at a portion of contact between a curved surface of the object and a surface of the polishing tool; and   controlling a polishing pressure and a shape of a polishing portion in the polishing tool so that the contact pressure is uniform.