Forming sacrificial structures using phase-change materials that sublimate

Abstract

A structure can include a first layer of a polymer material and a second layer of the polymer material on the first layer, the first and second layers of the polymer material defining a hollow space that was formed by way of a temporary sacrificial structure that was made of a sublimable material.

What is claimed is: 
     
         1 . A structure, comprising:
 a first layer of a polymer material; and   a second layer of the polymer material on the first layer, the first and second layers of the polymer material defining a hollow space that was formed by way of a temporary sacrificial structure that was made of a sublimable material.   
     
     
         2 . The structure of  claim 1 , wherein the sublimable material includes cyclododecane and/or other phase-change composites. 
     
     
         3 . The structure of  claim 1 , wherein the sacrificial structure has been removed by way of sublimation. 
     
     
         4 . The structure of  claim 3 , wherein the sublimation was performed at a pressure of approximately 1 millitorr. 
     
     
         5 . The structure of  claim 3 , wherein the sublimation was performed at a temperature less than 160 degrees C. 
     
     
         6 . The structure of  claim 5 , wherein the temperature was approximately 55 degrees C. 
     
     
         7 . The structure of  claim 1 , wherein the polymer material is an ultraviolet-curable polymer material. 
     
     
         8 . The structure of  claim 1 , wherein the hollow space is a cavity or a channel. 
     
     
         9 . The structure of  claim 1 , the first and second layers of the polymer material defining another hollow space that was formed by way of another temporary sacrificial structure that was made of the sublimable material. 
     
     
         10 . The structure of  claim 1 , further comprising a third layer of the polymer material on the second layer, the third and second layers of the polymer material defining another hollow space that was formed by way of another temporary sacrificial structure that was made of the sublimable material. 
     
     
         11 . A method, comprising:
 depositing a first layer of a polymer material;   depositing a first amount of sublimable material on the first layer of the polymer material to form a first sacrificial structure;   depositing a second layer of the polymer material on the first amount of sublimable material and first layer of the polymer material; and   removing the sublimable material to form a first hollow space defined by the first and second layers of the polymer material.   
     
     
         12 . The method of  claim 11 , wherein the removing includes performing sublimation. 
     
     
         13 . The method of  claim 12 , wherein the sublimation includes heating at a certain temperature and at a certain pressure. 
     
     
         14 . The method of  claim 13 , wherein the certain pressure is approximately 1 millitorr. 
     
     
         15 . The method of  claim 13 , wherein the certain temperature is less than 160 degrees C. 
     
     
         16 . The method of  claim 15 , wherein the certain temperature is approximately 55 degrees C. 
     
     
         17 . The method of  claim 11 , wherein the sublimable material includes cyclododecane and/or other phase-change composites. 
     
     
         18 . The method of  claim 11 , wherein the hollow space is a cavity or a channel. 
     
     
         19 . The method of  claim 11 , further comprising to build multiple layered structures. depositing a second amount of sublimable material on the first layer of the polymer material to form a second sacrificial structure;
 depositing a third layer of the polymer material on the second amount of sublimable material and first layer of the polymer material; and   removing the sublimable material to form a second hollow space defined by the first and third layers of the polymer material.   
     
     
         20 . The method of  claim 11 , further comprising to build multiple layered structures.
 depositing a second amount of sublimable material on the second layer of the polymer material to form a second sacrificial structure;   depositing a third layer of the polymer material on the second amount of sublimable material and second layer of the polymer material; and   removing the second amount of sublimable material to form a second hollow space defined by the second and third layers of the polymer material.