Chemical mechanical polishing fastening device

Abstract

A chemical mechanical polishing fastening device includes an annular base and a fastening ring. The annular base has a first combining plane, a first inner annular plane, a first jointing plane, and a second inner annular plane. The diameter of the first inner annular plane is greater than that of the second inner annular plane. Two sides of the first inner annular base are connected to the first combining plane and the first jointing plane. Two sides of the first jointing plane are connected to the first inner annular plane and the second inner annular plane. The fastening ring has a second combining plane and an inner annular flange protruded from the second combining plane. The inner annular flange has an outer annular wall to be combined with the first inner annular plane and a top plane to be combined with the first jointing plane.

What is claimed is: 
     
         1 . A chemical mechanical polishing fastening device, comprising:
 an annular base, comprising a first combining plane, a first inner annular plane, a first jointing plane, and a second inner annular plane, wherein the first combining plane is parallel to the radial direction of the annular base, the diameter of the first inner annular plane is greater than the diameter of the second inner annular plane, two sides of the first inner annular plane are connected to the first combining plane and the first jointing plane, respectively, two sides of the first jointing plane are connected to the first inner annular plane and the second inner annular plane, respectively; and   a fastening ring, comprising a second combining plane and an inner annular flange, wherein the second combining plane is parallel to the radial direction of the fastening ring, the second combining plane is combined with the first combining plane of the annular base, the inner annular flange is protruded from the second combining plane, the inner annular flange has an outer annular wall and a top plane, the outer annular wall is combined with the first inner annular plane of the annular base, and the top plane is combined with the first jointing plane.   
     
     
         2 . The chemical mechanical polishing fastening device according to  claim 1 , wherein the distance between the top plane of the inner annular flange and the second combining plane of the fastening ring is defined in the range from 5 mm to 15 mm. 
     
     
         3 . The chemical mechanical polishing fastening device according to  claim 2 , wherein the thickness of the inner annular flange along the radial direction of the fastening ring is defined in the range from 1 mm to 5 mm. 
     
     
         4 . The chemical mechanical polishing fastening device according to  claim 3 , wherein the inner annular flange has an inner annular wall, the inner annular wall of the inner annular flange and the second inner annular plane are aligned at the same level. 
     
     
         5 . The chemical mechanical polishing fastening device according to  claim 4 , wherein a nominal fillet radius of 1.5 mm to 2.0 mm is defined at the connection between the first jointing plane and the first inner annular plane.