Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope

Abstract

An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.

1 . A scanning electron microscope (SEM) assembly for observing an object that is positioned in a non-vacuum environment, the SEM assembly comprising:
 an electron beam generator operative in a vacuum environment;   an interface separating said vacuum environment from said non-vacuum environment, said interface comprising at least one aperture array which is flexibly coupled with respect to said electron beam generator; and   at least one motor associated with said at least one aperture array and operative to introduce a vertical movement of said at least one aperture array thereby to enable maintenance of a fixed distance between said at least one aperture array and said object.   
     
     
         2 . The SEM assembly according to  claim 1  and also comprising a detector detecting results of an interaction between at least one electron beam generated by said electron beam generator and said object. 
     
     
         3 . The SEM assembly according to  claim 2  wherein said detector detects electrons generated as a result of said interaction. 
     
     
         4 . The SEM assembly according to  claim 2  wherein said detector detects X-ray emissions generated as a result of said interaction. 
     
     
         5 . The SEM assembly according to  claim 2  wherein said detector is positioned within said vacuum environment. 
     
     
         6 . The SEM assembly according to  claim 2  wherein said detector is positioned within said non-vacuum environment. 
     
     
         7 . A method for observing an object that is positioned in a non-vacuum environment, the method comprising:
 generating at least one electron beam, by an electron bean generator, in a vacuum environment;   flexibly coupling at least one aperture array relative to said electron beam generator, said aperture array being sealed by at least one membrane, said at least one membrane separating said vacuum environment from said non-vacuum environment;   maintaining a fixed distance between said at least one aperture array and said object by vertically moving said at least one aperture array;   directing said at least one electron beam through said aperture array towards said object, which is positioned in said non-vacuum environment; and   detecting results of an interaction between said at least one electron beam and said object.   
     
     
         8 . The method according to  claim 7  wherein said detecting comprises detecting electrons generated by said interaction. 
     
     
         9 . The method according to  claim 7  wherein said detecting comprises detecting photons generated by said interaction. 
     
     
         10 . The method according to  claim 7  wherein said detecting comprises detecting X-ray emissions generated by said interaction. 
     
     
         11 . The method according to  claim 7  wherein said detecting comprises using a detector positioned within said vacuum environment. 
     
     
         12 . The method according to  claim 7  wherein said detecting comprises using a detector positioned within said non-vacuum environment. 
     
     
         13 . A scanning electron microscope (SEM) interface between a vacuum environment and a non-vacuum environment in which an object is located, for use with a SEM assembly, the SEM assembly including an electron beam generator operative in said vacuum environment, the SEM interface comprising:
 at least one aperture array which is flexibly coupled with respect to said electron beam generator; and   at least one motor associated with said at least one aperture array and operative to introduce a vertical movement of said at least one aperture array thereby to enable maintenance of a fixed distance between said at least one aperture array and said object.   
     
     
         14 . The SEM interface according to  claim 13  wherein apertures of said at least one aperture array are positioned at a single horizontal-plane. 
     
     
         15 . The SEM interface according to  claim 13  wherein at least one aperture of said at least one aperture array is positioned at a different height than at least one other aperture of said at least one aperture array. 
     
     
         16 . The SEM interface according to  claim 13  wherein at least one aperture of said at least one aperture array enables an acquisition of a higher resolution image than at least one other aperture of said at least one aperture array.