Mems oscillator

Abstract

A device comprising, a mirror which is configured to oscillate in response to an oscillation signal, wherein the device is configured such that oscillation of the mirror will induce a signal; and a circuit in operable cooperation with the mirror such that an induced signal can be measured by the circuit and wherein the circuit is configured to provide an oscillation signal proportional to the measured induced signal; wherein the device is configured such that the mirror can receive the oscillation signal so that the oscillation signal is filtered due to oscillation limitations of mirror, to provide a filtered signal.

1 - 15 . (canceled) 
     
     
         16 . A device comprising:
 a mirror to oscillate in response to an oscillation signal and to filter the oscillation signal based at least in part on oscillation of the mirror; and   an amplifier to receive the filtered oscillation signal and to generate the oscillation signal to oscillate the mirror at a resonant frequency of the mirror.   
     
     
         17 . The device of  claim 16 , the mirror to filter the oscillation signal based at least in part on oscillation limitations of the mirror. 
     
     
         18 . The device of  claim 16 , comprising a coil attached to the mirror, the coil configured to conduct the oscillation signal and to conduct the filtered oscillation signal. 
     
     
         19 . The device of  claim 16 , comprising:
 a first coil to conduct the oscillation signal; and   a second coil to conduct the filtered oscillation signal.   
     
     
         20 . The device of  claim 19 , the mirror comprising an oscillating portion and a fixed portion, the first coil attached to the oscillating portion and the second coil attached to the fixed portion. 
     
     
         21 . The device of  claim 16 , the amplifier comprising:
 a comparator, the comparator to:
 compare a phase of the oscillation signal to a phase of the filtered oscillation signal; and 
 generate a control signal based on a comparison of the phase of the oscillation signal to the phase of the filtered oscillation signal; and 
   an oscillator to receive the control signal and to generate oscillation signal based at least in part on the control signal.   
     
     
         22 . The device of  claim 21 , wherein the oscillation signal defines a clock signal for a modulation circuit. 
     
     
         23 . The device of  claim 16 , the mirror comprising an oscillating portion and a fixed portion, the device comprising:
 a first electrode attached to the oscillating portion of the mirror; and   a second electrode attached to the fixed portion of the mirror, wherein the first and second electrodes define a capacitor to filter the oscillation signal.   
     
     
         24 . The device of  claim 16 , the mirror comprising an oscillating portion and a fixed portion, the device comprising:
 a magnet attached to either one of the oscillating portion or the fixed portion; and   a coil attached to the other one of the oscillating portion or the fixed portion, wherein the magnet induced the filtered oscillation signal in the coil.   
     
     
         25 . A device comprising:
 a mirror to receive a plurality of laser pulses and to oscillate in response to an oscillation signal to project an image based on the plurality of laser pulses, the mirror to filter the oscillation signal based at least in part on oscillation of the mirror; and   an amplifier to receive the filtered oscillation signal and to generate the oscillation signal to oscillate the mirror at a resonant frequency of the mirror.   
     
     
         26 . The device of  claim 25 , the mirror to filter the oscillation signal based at least in part on oscillation limitations of the mirror. 
     
     
         27 . The device of  claim 25 , comprising a coil attached to the mirror, the coil configured to conduct the oscillation signal and to conduct the filtered oscillation signal. 
     
     
         28 . The device of  claim 25 , comprising:
 a first coil to conduct the oscillation signal; and   a second coil to conduct the filtered oscillation signal.   
     
     
         29 . The device of  claim 28 , the mirror comprising an oscillating portion and a fixed portion, the first coil attached to the oscillating portion and the second coil attached to the fixed portion. 
     
     
         30 . The device of  claim 25 , the amplifier comprising:
 a comparator, the comparator to:
 compare a phase of the oscillation signal to a phase of the filtered oscillation signal; and 
 generate a control signal based on a comparison of the phase of the oscillation signal to the phase of the filtered oscillation signal; and 
   an oscillator to receive the control signal and to generate oscillation signal based at least in part on the control signal.   
     
     
         31 . The device of  claim 30 , wherein the oscillation signal defines a clock signal for a modulation circuit. 
     
     
         32 . The device of  claim 31 , wherein the modulation circuit is a laser modulation circuit of an image projection system. 
     
     
         33 . The device of  claim 25 , the mirror comprising an oscillating portion and a fixed portion, the device comprising:
 a first electrode attached to the oscillating portion of the mirror; and   a second electrode attached to the fixed portion of the mirror, wherein the first and second electrodes define a capacitor to filter the oscillation signal.   
     
     
         34 . The device of  claim 25 , the mirror comprising an oscillating portion and a fixed portion, the device comprising:
 a magnet attached to either one of the oscillating portion or the fixed portion; and   a coil attached to the other one of the oscillating portion or the fixed portion, wherein the magnet induced the filtered oscillation signal in the coil.   
     
     
         35 . A method comprising:
 filtering an oscillation signal at a mirror to oscillate in response to the oscillation signal; and   amplifying the filtered oscillation signal to generate the oscillation signal to oscillate the mirror at a resonant frequency of the mirror.   
     
     
         36 . The method of  claim 35 , comprising filtering the oscillation signal based at least in part on oscillation limitations of the mirror. 
     
     
         37 . The method of  claim 35 , comprising inducing the filtered oscillation signal in a coil attached to the mirror. 
     
     
         38 . The method of  claim 35 , comprising filtering the oscillation signal based at least in part on a capacitance of a capacitor defined by a first and a second electrode attached to the mirror. 
     
     
         39 . The method of  claim 35 , comprising:
 comparing a phase of the oscillation signal to a phase of the filtered oscillation signal;   generating a control signal based on a comparison of the phase of the oscillation signal to the phase of the filtered oscillation signal; and   generating the oscillation signal based at least in part on the control signal.   
     
     
         40 . The method of  claim 35 , wherein the oscillation signal defines a clock signal for an image projection system modulation circuit.