Manufacturing method for high-temperature piezoelectric element electrode and piezoelectric element structure

Abstract

A manufacturing method for an electrode of a high-temperature piezoelectric element, comprises: coating traditional conductive slurry on surfaces of a molded piezoelectric material ( 1 ); then polarizing the piezoelectric material ( 1 ); and then removing the coating of conductive slurry ( 2 ) on the surfaces there of, and connecting the piezoelectric material to outside electrode lead wires ( 3 ) to output a signal generated by piezoelectric effect thereof. A structure of a high-temperature piezoelectric element, comprises polarized piezoelectric material ( 1 ), wherein the coating of metallic conductive slurry ( 2 ) is removed from the surfaces of the polarized piezoelectric material ( 1 ) and the surfaces of the polarized piezoelectric material ( 1 ) is connected to electrode lead wires ( 3 ) to output a signal generated by piezoelectric effect thereof. By removing the traditional coating of slurry for electrode, it is avoided that the output resistance of the piezoelectric element is reduced because of the high temperature diffusion of electrode material at a high temperature, and the thermal performance of the piezoelectric element is improved. By adding diamond or graphite coating as electrode, the sensitivity of outputting charges of the piezoelectric element is improved.

1 . A manufacturing method for an electrode of a high-temperature piezoelectric element, wherein it comprises the following steps: a) molding piezoelectric material according to specifications; b) coating, sputtering or evaporating traditional conductive slurry on upper and lower surfaces of the molded piezoelectric material; c) polarizing the piezoelectric material coated with the conductive slurry; d) removing the coating of the conductive slurry on the surfaces of the piezoelectric material; e) connecting electrode lead wires on the surfaces of the piezoelectric material, to output a signal generated by piezoelectric effect thereof. 
     
     
         2 . The manufacturing method for an electrode of a high-temperature piezoelectric element according to  claim 1 , wherein it further comprises step f) connecting the piezoelectric materials which have the coatings removed by way of stacking or series-parallel connection. 
     
     
         3 . The manufacturing method for an electrode of a high-temperature piezoelectric element according to  claim 1 , wherein it further comprises spraying diamond or graphite on the surfaces of the piezoelectric material which has the coating removed to form electrodes, and adjusting the roughness of the sprayed surfaces. 
     
     
         4 . The manufacturing method for an electrode of a high-temperature piezoelectric element according to  claim 3 , wherein adjusting the roughness of the sprayed surfaces is by means of grinding. 
     
     
         5 . The manufacturing method for an electrode of a high-temperature piezoelectric element according to  claim 3 , wherein it further comprises connecting the piezoelectric materials which have diamond or graphite electrodes sprayed on by way of stacking or series-parallel connection. 
     
     
         6 . The manufacturing method for an electrode of a high-temperature piezoelectric element according to  claim 1 , wherein the conductive slurry is metallic slurry; removing the coating of the conductive slurry is by chemical etching or in a physical manner. 
     
     
         7 . A structure of a high-temperature piezoelectric element, comprising polarized piezoelectric material, wherein the polarized piezoelectric material has coating of metallic conductive slurry removed from its surfaces; the surfaces of the polarized piezoelectric material are connected to electrode lead wires to output a signal generated by piezoelectric effect thereof. 
     
     
         8 . The structure of a high-temperature piezoelectric element according to  claim 7 , wherein diamond or graphite are sprayed on the surfaces of the polarized piezoelectric material to form electrodes. 
     
     
         9 . The structure of a high-temperature piezoelectric element according to  claim 7 , wherein the structure of the piezoelectric element comprises multiple layers of the piezoelectric material; the respective piezoelectric materials are connected by way of stacking or series-parallel connection. 
     
     
         10 . The manufacturing method for an electrode of a high-temperature piezoelectric element according to  claim 2 , wherein the conductive slurry is metallic slurry; removing the coating of the conductive slurry is by chemical etching or in a physical manner. 
     
     
         11 . The manufacturing method for an electrode of a high-temperature piezoelectric element according to  claim 3 , wherein the conductive slurry is metallic slurry; removing the coating of the conductive slurry is by chemical etching or in a physical manner. 
     
     
         12 . The manufacturing method for an electrode of a high-temperature piezoelectric element according to  claim 4 , wherein the conductive slurry is metallic slurry; removing the coating of the conductive slurry is by chemical etching or in a physical manner. 
     
     
         13 . The manufacturing method for an electrode of a high-temperature piezoelectric element according to  claim 5 , wherein the conductive slurry is metallic slurry; removing the coating of the conductive slurry is by chemical etching or in a physical manner. 
     
     
         14 . The structure of a high-temperature piezoelectric element according to  claim 8 , wherein the structure of the piezoelectric element comprises multiple layers of the piezoelectric material; the respective piezoelectric materials are connected by way of stacking or series-parallel connection.