US2016141265A1PendingUtilityA1

Bumpless build-up layer package including a release layer

Assignee: INTEL CORPPriority: Dec 21, 2012Filed: Jan 27, 2016Published: May 19, 2016
Est. expiryDec 21, 2032(~6.4 yrs left)· nominal 20-yr term from priority
H10W 72/874H10W 72/9413H10W 70/09H10P 72/7424H10P 72/74H10W 70/093H10W 70/685H10W 70/614H10W 70/69H05K 1/185H01L 2224/821H01L 2224/82002H01L 2224/82862H01L 2224/82031H01L 24/82H01L 2224/82375H01L 2224/82399H05K 3/4682H05K 2203/0152
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Claims

Abstract

An example includes a die package including a microelectronic die having a lower die surface, an upper die surface parallel to the lower die surface, and a die side, the microelectronic die including an active region and an inactive region. The example optionally includes a release layer having a lower release layer surface, an upper release layer surface parallel to the lower release layer surface, and at least one release layer side, the release layer coupled with the upper surface of the microelectronic die in thermal communication with the inactive region of the die and electrically insulated from the active region. The example optionally includes an encapsulation material encapsulating the die side and the release layer side and lower release layer surface, the encapsulation material including a lower surface substantially parallel to the die lower surface and an upper surface substantially parallel to the die upper surface.

Claims

exact text as granted — not AI-modified
1 . (canceled) 
     
     
         2 . A method of building up a microelectronic die package, the method comprising:
 coupling an resin layer onto a metal film;   coupling a release layer onto the resin layer;   adhering the release layer to a substrate with a weak adhesion bond;   creating a cavity in the metal film; and   coupling a microelectronic die onto the metal film, inside the cavity.   
     
     
         3 . The method of  claim 2 , wherein coupling the resin layer onto the metal film includes spraying the resin layer onto the metal film. 
     
     
         4 . The method of  claim 3 , wherein coupling the resin layer onto the metal film includes spraying the resin layer onto the metal film in a pattern that covers less than an entire surface of the metal film. 
     
     
         5 . The method of  claim 4 , comprising coupling the release layer onto the resin layer in a pattern that covers an entire exposed surface of the resin layer. 
     
     
         6 . The method of  claim 2 , wherein coupling the resin layer onto the metal film includes rolling the resin layer from a roll of resin layer onto the metal film. 
     
     
         7 . The method of  claim 6 , wherein coupling the resin layer onto the metal film includes rolling the resin layer onto the metal film in a pattern that covers less than an entire surface of the metal film, including periodically cutting the roll. 
     
     
         8 . The method of  claim 2 , comprising coupling a primer on the resin layer, wherein coupling the release layer onto the resin layer includes coupling the release layer onto the primer. 
     
     
         9 . The method of  claim 2 , comprising creating the cavity includes etching the metal film. 
     
     
         10 . The method of  claim 2 , comprising forming build-up layers on the metal film, around the top microelectronic die. 
     
     
         11 . The method of  claim 2 , further comprising adhering the release layer to a surface of a substrate with a weak adhesion bond including pressing the release layer to the surface of the substrate under a pressure at a temperature in excess of an ambient temperature. 
     
     
         12 . A method of packaging a microelectronic die, comprising:
 coupling a top resin layer onto a top metal film;   coupling a top release layer onto the top resin layer;   coupling a bottom resin layer onto a bottom metal film;   coupling a bottom release layer onto the bottom resin layer;   adhering the top release layer to a top surface of a substrate with a weak adhesion bond;   adhering the bottom release layer to a bottom surface of the substrate with a weak adhesion bond;   creating a top cavity in the top metal film;   creating a bottom cavity in the bottom metal film;   coupling a top microelectronic die to the top metal film in the top cavity;   coupling a bottom microelectronic die to the bottom metal film in the bottom cavity;   cutting the top metal film, top release layer, top resin, bottom metal film, bottom release layer, bottom resin and substrate, with a cut line disposed between a portion of the top resin layer that is coupled with the substrate and between a portion of the bottom resin layer that is coupled with the substrate;   overcoming the weak adhesion bond separating the top release layer from the top surface of the substrate; and   overcoming the weak adhesion bond separating the bottom release layer from the bottom surface of the substrate.   
     
     
         13 . The method of  claim 12 , comprising creating the top cavity includes etching the top metal film, and creating the bottom cavity includes etching the bottom metal film. 
     
     
         14 . The method of  claim 12 , comprising forming top build-up layers on the top metal film, around the top microelectronic die onto the top metal film, and forming bottom build-up layers on the bottom metal film, around the bottom microelectronic die onto the bottom metal film. 
     
     
         15 . The method of  claim 12 , wherein adhering the top release layer to a top surface of a substrate with a weak adhesion bond includes pressing the top release layer to the top surface of the substrate under a pressure at a temperature in excess of an ambient temperature, and wherein adhering the bottom release layer to a bottom surface of a substrate with a weak adhesion bond includes concurrently pressing the bottom release layer to the bottom surface of the substrate under the same pressure and temperature. 
     
     
         16 . The method of  claim 12 , wherein coupling the top resin layer onto the top metal film includes spraying the top resin layer onto the top metal film. 
     
     
         17 . The method of  claim 16 , wherein coupling the top resin layer onto the top metal film includes spraying the resin layer onto the metal film in a pattern that covers less than an entire surface of the metal film. 
     
     
         18 . The method of  claim 17 , comprising coupling the top release layer onto the top resin layer in a pattern that covers an entire exposed surface of the top resin layer. 
     
     
         19 . The method of  claim 12 , wherein coupling the top resin layer onto the top metal film includes rolling the top resin layer from a roll of resin onto the top metal film. 
     
     
         20 . The method of  claim 19 , wherein coupling the top resin layer onto the top metal film includes rolling the top resin layer onto the top metal film in a pattern that covers less than an entire surface of the top metal film and including periodically cutting the roll. 
     
     
         21 . The method of  claim 12 , comprising coupling a primer on the top resin layer, wherein coupling the top release layer onto the top resin layer includes coupling the top release layer onto the primer.

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