Polishing pad and method for making the same

Abstract

The present invention relates to a polishing pad and a method for making the same. The polishing pad includes a base layer and a polishing layer. The base layer has a first surface and a second surface. The polishing layer is disposed on the first surface of the base layer and has a plurality of second fibers, a polymeric elastomer and a plurality of pores. The second fibers are arranged irregularly and cross each other to form the pores, and the polymeric elastomer is attached to the second fibers and does not fill the pores.

What is claimed is: 
     
         1 . A polishing pad, comprising:
 a base layer having a first surface and a second surface; and   a polishing layer disposed on the first surface of the base layer and having a plurality of second fibers, a polymeric elastomer and a plurality of pores, wherein the second fibers are arranged irregularly and cross each other to form the pores, and the polymeric elastomer is attached to the second fibers and does not fill the pores.   
     
     
         2 . The polishing pad according to  claim 1 , wherein the base layer is a non-woven fabric and has a plurality of first fibers, and the length of the first fibers is less than or equal to that of the second fibers. 
     
     
         3 . The polishing pad according to  claim 1 , wherein the second fibers are formed by melt blowing. 
     
     
         4 . The polishing pad according to  claim 1 , wherein the pores have a plurality of openings on a surface of the polishing layer, the size of the openings is 0.01 μm to 1 μm; and the fiber fineness of the second fibers is 0.01 mm to 1 mm. 
     
     
         5 . The polishing pad according to  claim 1 , wherein the second fibers are formed by curing a second polymeric material, the second polymeric material is selected from a group consisting of polyamide resin, polyethylene terephthalate (PET), nylon, polyproylene (PP), polyester resin, acrylic resin, polyacrylonitrile resin and thermoplastic urethane (TPU); the polymeric elastomer is formed by curing a third polymeric material, the third polymeric material is selected from a group consisting of polyethylene terephthalate resin, oriented polypropylene resin, polycarbonate resin, polyamide resin, epoxy resin, phenolic resin, polyurethane resin, polystyrene resin and acrylic resin. 
     
     
         6 . A method for making a polishing pad, comprising the following steps:
 (a) providing a base layer, wherein the base layer has a first surface and a second surface;   (b) heating a second polymeric material to a molten state;   (c) spraying the second polymeric material in the molten state on the first surface of the base layer, wherein the second polymeric material forms a plurality of second fibers, and the second fibers are arranged irregularly and cross each other to form a plurality of pores; and   (d) impregnating the second fibers in a third polymeric material, so that the third polymeric material is attached to the second fibers and does not fill the pores, so as to form a polishing layer.   
     
     
         7 . The method according to  claim 6 , wherein the base layer of the step (a) is a non-woven fabric and has a plurality of first fibers, and the length of the first fibers is less than or equal to that of the second fibers. 
     
     
         8 . The method according to  claim 6 , wherein a viscosity of the second polymeric material of the step (b) is greater than that of the third polymeric material of the step (d). 
     
     
         9 . The method according to  claim 6 , wherein, in the step (c), the second fibers are injected by using a nozzle, and there is a relative movement between the nozzle and the base layer; after the step (c), the method further comprises a step of cooling the second fibers. 
     
     
         10 . The method according to  claim 6 , wherein, in the step (d), the base layer and the polishing layer form a porous material, and after the step (d), the method further comprises:
 (d1) extruding the porous material by using an extrusion wheel, so as to squeeze out the excess third polymeric material; and   (d2) cooling the third polymeric material on the second fibers, so as to form a polymeric elastomer.