Microelectromechanical system layout using genotype performance simulation

Abstract

Methods for producing layout data for devices are described. One method includes using a genetic algorithm to determine a structure of a thermally.operated actuator. Reference system performance characteristics are received and structure genotypes produced, each structure genotype including geometric and thermal properties of each of a plurality of links in the microelectromechanical system, the geometric and thermal properties selected randomly. Respective system performance characteristics of the genotypes are simulated and respective fitness ratings determined with respect to the reference. A second population of structure genotypes is produced using the first population and the determined fitness ratings. The steps are iterated until one of the structure genotypes satisfies selected termination criteria. Layout data corresponding to the geometric properties in the one of the structure genotypes are automatically produced using the controller.

1 . A method for producing layout data corresponding to a microelectromechanical system, the method comprising automatically performing the following steps using a controller:
 receiving reference system performance characteristics;   producing a first population of structure genotypes, each structure genotype including geometric and thermal properties of each of a plurality of links in the microelectromechanical system, the geometric and thermal properties selected randomly;   simulating respective system performance characteristics of each of the structure genotypes in the first population;   determining a respective fitness rating of each of the structure genotypes in the first population by comparing the simulated respective system performance characteristics to the reference system performance characteristics;   producing a second population of structure genotypes using the first population and the determined fitness ratings;   iterating the simulating, determining.fitness.rating, and producing steps using the second population in place of the first population until one of the structure genotypes satisfies selected termination criteria; and   automatically producing the layout data corresponding to the geometric properties in the one of the structure genotypes using the controller.   
     
     
         2 . The method according to  claim 1 , wherein:
 the electromechanical system is a thermally.operated actuator;   the reference system performance characteristics are reference actuator performance characteristics;   each structure genome includes geometric and thermal properties of each of the plurality of links in the thermally.operated actuator;   the simulated respective system performance characteristics are respective actuator performance characteristics; and   the determining step includes comparing the simulated respective actuator performance characteristics to the reference actuator performance characteristics.   
     
     
         3 . The method according to  claim 1 , wherein the iterating step includes iterating for a selected number of iterations. 
     
     
         4 . The method according to  claim 1 , wherein the respective fitness rating is a ranking 
     
     
         5 . The method according to  claim 1 , wherein the producing.second.population step includes mutating first selected one(s) of the first population and performing crossovers among second selected one(s) of the first population. 
     
     
         6 . The method according to  claim 1 , wherein the simulating step includes constructing a respective three.dimensional model for each of the structure genotypes using the corresponding geometric properties and performing a static simulation of the respective three.dimensional model under conditions specified by the corresponding thermal properties. 
     
     
         7 . The method according to  claim 1 , wherein the geometric properties include length, width, and angle. 
     
     
         8 . The method according to  claim 1 , wherein the thermal properties include link temperature. 
     
     
         9 . The method according to  claim 1 , wherein each structure genotype further includes material properties of each of a plurality of links. 
     
     
         10 . The method according to  claim 9 , wherein the material properties include one or more properties selected from the group including temperature, Young's modulus, electrical conductivity, thermal conductivity, thermal expansion coefficient, capacitance, piezoelectric constant, density, viscosity, heat capacity, inductance, permittivity, permeability, residual stress, and strain.