Pmr writer with constant side wall angle

Abstract

A writer main pole for a perpendicular magnetic recording system is provided. The writer pole may have a constant sidewall angle from the ABS to yoke and may be formed out of an insulating material and a magnetic material. The sidewall angle of the yoke region may be adjusted during manufacture. The ABS region may correspond to the magnetic material and the yoke region may correspond to the insulating material. The insulating material may comprise Alumina. The magnetic material may comprise a NiFe alloy.

What is claimed is: 
     
         1 . A perpendicular magnetic recording writer main pole, comprising:
 a first hard mask and a second hard mask formed over the top of a layer of insulating and magnetic material formed over a substrate;   an air-bearing surface (ABS) region formed in the magnetic material with a first sidewall angle;   a yoke region formed in the insulating material with a second sidewall angle;   wherein the second sidewall angle is decreased by performing a reactive ion etch (“RIE”) on the insulating material using the first hard mask.   
     
     
         2 . The perpendicular magnetic recording writer main pole of  claim 1 , wherein the ABS region and yoke region are formed using the second hard mask. 
     
     
         3 . The perpendicular magnetic recording writer main pole of  claim 2 , wherein the ABS region and yoke region comprise a resist pattern formed over a portion of the second hard mask and a third hard mask deposited over the resist pattern,
 wherein a portion of the third hard mask deposited over the resist pattern is removed to form a patterned third hard mask,   wherein a RIE is performed on the second hard mask using the third hard mask, and wherein a RIE is performed on the first hard mask, insulating material, and magnetic material using the second hard mask.   
     
     
         4 . The perpendicular magnetic recording writer main pole of  claim 1 , wherein the magnetic material comprises nickel-iron (NiFe). 
     
     
         5 . The perpendicular magnetic recording writer main pole of  claim 1 , wherein the insulating material comprises alumina (Al 2 O 3 ). 
     
     
         6 . The perpendicular magnetic recording writer main pole of  claim 1 , wherein the second sidewall angle is decreased to within 2 or fewer degrees of the first sidewall angle. 
     
     
         7 . The perpendicular magnetic recording writer main pole of  claim 1 , wherein the first and second sidewall angles are between 11 and 13 degrees. 
     
     
         8 . The perpendicular magnetic recording writer main pole of  claim 1 , wherein the first hard mask comprises nickel chromium (NiCr). 
     
     
         9 . The perpendicular magnetic recording writer main pole of  claim 1 , wherein the second hard mask comprises tantalum (Ta). 
     
     
         10 . The perpendicular magnetic recording writer main pole of  claim 1 , wherein the third hard mask comprises at least one of chromium (Cr) or ruthenium (Ru). 
     
     
         11 . The perpendicular magnetic recording writer main pole of  claim 1 , wherein the yoke region is 20 to 250 nm behind the ABS. 
     
     
         12 . A perpendicular magnetic recording writer main pole created by a process, the process comprising:
 depositing a first hard mask and a second hard mask over the top of a layer of insulating and magnetic material formed over a substrate;   forming an air-bearing surface (ABS) region in the magnetic material with a first sidewall angle;   forming a yoke region in the insulating material with a second sidewall angle;   decreasing the second sidewall angle by performing a reactive ion etch (“RIE”) on the insulating material using the first hard mask.   
     
     
         13 . The perpendicular magnetic recording writer main pole of  claim 12 , wherein the ABS region and yoke region are formed using the second hard mask. 
     
     
         14 . The perpendicular magnetic recording writer main pole of  claim 13 , wherein forming an ABS region and a yoke region comprises
 forming a resist pattern over a portion of the second hard mask;   depositing a third hard mask over the resist pattern;   removing a portion of the third hard mask deposited over the resist pattern to form a patterned third hard mask;   performing a RIE on the second hard mask using the third hard mask; and   performing a RIE on the first hard mask, insulating material, and magnetic material using the second hard mask.   
     
     
         15 . The perpendicular magnetic recording writer main pole of  claim 12 , wherein the magnetic material comprises nickel-iron (NiFe). 
     
     
         16 . The perpendicular magnetic recording writer main pole of  claim 12 , wherein the insulating material comprises alumina (Al 2 O 3 ). 
     
     
         17 . The perpendicular magnetic recording writer main pole of  claim 12 , wherein the second sidewall angle is decreased to within 2 or fewer degrees of the first sidewall angle. 
     
     
         18 . The perpendicular magnetic recording writer main pole of  claim 12 , wherein the first and second sidewall angles are between 11 and 13 degrees. 
     
     
         19 . The perpendicular magnetic recording writer main pole of  claim 12 , wherein the first hard mask comprises nickel chromium (NiCr). 
     
     
         20 . The perpendicular magnetic recording writer main pole of  claim 12 , wherein the second hard mask comprises tantalum (Ta). 
     
     
         21 . The perpendicular magnetic recording writer main pole of  claim 12 , wherein the third hard mask comprises at least one of chromium (Cr) or ruthenium (Ru). 
     
     
         22 . The perpendicular magnetic recording writer main pole of  claim 12 , wherein the yoke region is 20 to 250 nm behind the ABS.