Organic layer deposition apparatus, method of manufacturing organic light emitting display device using the apparatus, and organic light emitting display device manufactured using the method

Abstract

An organic layer deposition apparatus, a method of manufacturing an organic light-emitting display device by using the same, and an organic light-emitting display device manufactured using the method, and in particular, an organic layer deposition apparatus that is suitable for use in the mass production of a large substrate and enables high-definition patterning, a method of manufacturing an organic light-emitting display device by using the same, and an organic light-emitting display device manufactured using the method.

What is claimed is: 
     
         1 . An organic layer deposition apparatus comprising:
 a conveyer unit comprising a transfer unit for fixing a substrate and configured to move along with the substrate, a first conveyer unit for moving in a first direction the transfer unit on which the substrate is fixed, and a second conveyer unit for moving in a direction opposite to the first direction the transfer unit from which the substrate is separated after deposition has been completed; and   a deposition unit comprising a chamber maintained in a vacuum state and at least one organic layer deposition assembly for depositing an organic layer on the substrate fixed on the transfer unit,   the transfer unit comprises:
 a carrier comprising a contactless power supply (CPS) module; and 
 an electrostatic chuck fixedly coupled to the carrier to fix the substrate, 
   the transfer unit is configured to circulate between the first conveyer unit and the second conveyer unit, and   the substrate fixed on the transfer unit is configured to be spaced apart from the organic layer deposition assembly by a set distance while being transferred by the first conveyer unit.   
     
     
         2 . The organic layer deposition apparatus of  claim 1 , wherein a charging track is on a location corresponding to the CPS module in the second conveyer unit so that a magnetic field is formed between the charging track and the CPS module when the carrier is conveyed in the second conveyer unit and an electric power is supplied to the CPS module in a non-contact manner. 
     
     
         3 . The organic layer deposition apparatus of  claim 1 , wherein the first conveyer unit comprises a pair of guide rails that are formed in parallel with each other and guide blocks coupled to the guide rails. 
     
     
         4 . The organic layer deposition apparatus of  claim 3 , wherein a charging track is in the guide rail at a portion corresponding to the CPS module so that a magnetic field is formed between the charging track and the CPS module when the carrier is conveyed in the first conveyer unit and an electric power is supplied to the CPS module in a non-contact manner. 
     
     
         5 . The organic layer deposition apparatus of  claim 1 , wherein an iron chuck for adsorbing the substrate is further formed at a side of the electrostatic chuck, and the iron chuck is configured to contact the substrate. 
     
     
         6 . The organic layer deposition apparatus of  claim 1 , wherein the first conveyer unit and the second conveyer unit are configured to pass through the deposition unit. 
     
     
         7 . The organic layer deposition apparatus of  claim 1 , wherein the first conveyer unit and the second conveyer unit are respectively arranged above and below in parallel to each other. 
     
     
         8 . The organic layer deposition apparatus of  claim 1 , further comprising:
 a loading unit for fixing the substrate on the transfer unit; and   an unloading unit for separating, from the transfer unit, the substrate on which the deposition has been completed while passing through the deposition unit.   
     
     
         9 . The organic layer deposition apparatus of  claim 8 , wherein the first conveyer unit is configured to sequentially convey the transfer unit into the loading unit, the deposition unit, and the unloading unit. 
     
     
         10 . The organic layer deposition apparatus of  claim 8 , wherein the second conveyer unit is configured to sequentially convey the transfer unit into the unloading unit, the deposition unit, and the loading unit. 
     
     
         11 . The organic layer deposition apparatus of  claim 1 , wherein the organic layer deposition assembly comprises:
 a deposition source for discharging a deposition material;   a deposition source nozzle unit at a side of the deposition source and comprising a plurality of deposition source nozzles; and   a patterning slit sheet facing the deposition source nozzle unit and comprising a plurality of patterning slits arranged along a direction,   wherein the deposition source is configured to discharge the deposition material to pass through the patterning slit sheet to be deposited on the substrate in a certain pattern.   
     
     
         12 . The organic layer deposition apparatus of  claim 11 , wherein the patterning slit sheet of the organic layer deposition assembly is formed smaller than the substrate in at least any one of the first direction and a second direction perpendicular to the first direction. 
     
     
         13 . The organic layer deposition apparatus of  claim 1 , wherein a magnetic rail is on a surface of the carrier, each of the first conveyer unit and the second conveyer unit comprises a plurality of coils, wherein the magnetic rail and the plurality of coils are combined together to constitute an operation unit for generating a driving force to move the transfer unit. 
     
     
         14 . The organic layer deposition apparatus of  claim 13 , wherein the first conveyer unit comprises guide members each comprising an accommodation groove, wherein the respective accommodation grooves are configured to accommodate both sides of the transfer unit, to guide the transfer unit to move in the first direction; and a magnetically suspended bearing that is configured to suspend the transfer unit from the accommodation grooves so as to move the transfer unit in a non-contact manner with the accommodation grooves. 
     
     
         15 . The organic layer deposition apparatus of  claim 14 , wherein the magnetically suspended bearing comprises side magnetically suspended bearings arranged on both side surfaces of the carrier and upper magnetically suspended bearings arranged above the carrier.