Robot, robot control device, and robot system

Abstract

A robot includes a base, a first arm rotatably connected to the base around a first rotating axis, a second arm rotatably connected to the first arm around a second rotating axis orthogonal to the first rotating axis, a third arm rotatably connected to the second arm around a third rotating axis parallel to the second rotating axis, a first angular velocity sensor provided in the first arm and having an angular velocity detection axis parallel to the first rotating axis, and a second angular velocity sensor provided in the second arm and having an angular velocity detection axis parallel to the third rotating axis.

What is claimed is: 
     
         1 . A robot comprising:
 a base;   an arm that includes a first arm that is rotated around a first rotation axis and a second arm that is rotated around a second rotation axis in a direction different from the first rotation axis; and   a first inertia sensor that is installed at the first arm;   wherein the first arm is coupled to the base and is controlled based on an output from the first inertia sensor, and   a vibration of the arm is suppressed based on the output from the first inertia sensor.   
     
     
         2 . The robot according to  claim 1 , wherein
 a vibration of the first arm is suppressed by a control of the first arm based on the output from the first inertia sensor.   
     
     
         3 . The robot according to  claim 1 , wherein
 the first rotation axis coincides with a normal of an installation surface of the base.   
     
     
         4 . The robot according to  claim 2 , wherein
 the first rotation axis coincides with a normal of an installation surface of the base.   
     
     
         5 . The robot according to  claim 1 , wherein
 the direction of the second rotation axis is perpendicular to the direction of the first rotation axis.   
     
     
         6 . The robot according to  claim 2 , wherein
 the direction of the second rotation axis is perpendicular to the direction of the first rotation axis.   
     
     
         7 . The robot according to  claim 3 , wherein
 the direction of the second rotation axis is perpendicular to the direction of the first rotation axis.   
     
     
         8 . The robot according to  claim 4 , wherein
 the direction of the second rotation axis is perpendicular to the direction of the first rotation axis.   
     
     
         9 . The robot according to  claim 1 , comprising:
 a second inertia sensor that is installed between the second arm and a front end of the arm; wherein   the second arm is coupled to the first arm, and   a vibration of the arm is suppressed based on an output from the second inertia sensor.   
     
     
         10 . The robot according to  claim 2 , comprising:
 a second inertia sensor that is installed between the second arm and a front end of the arm; wherein   the second arm is coupled to the first arm, and   a vibration of the arm is suppressed based on an output from the second inertia sensor.   
     
     
         11 . The robot according to  claim 3 , comprising:
 a second inertia sensor that is installed between the second arm and a front end of the arm; wherein   the second arm is coupled to the first arm, and   a vibration of the arm is suppressed based on an output from the second inertia sensor.   
     
     
         12 . The robot according to  claim 4 , comprising:
 a second inertia sensor that is installed between the second arm and a front end of the arm; wherein   the second arm is coupled to the first arm, and   a vibration of the arm is suppressed based on an output from the second inertia sensor.   
     
     
         13 . The robot according to  claim 5 , comprising:
 a second inertia sensor that is installed between the second arm and a front end of the arm; wherein   the second arm is coupled to the first arm, and   a vibration of the arm is suppressed based on an output from the second inertia sensor.   
     
     
         14 . The robot according to  claim 6 , comprising:
 a second inertia sensor that is installed between the second arm and a front end of the arm; wherein   the second arm is coupled to the first arm, and   a vibration of the arm is suppressed based on an output from the second inertia sensor.   
     
     
         15 . The robot according to  claim 7 , comprising:
 a second inertia sensor that is installed between the second arm and a front end of the arm; wherein   the second arm is coupled to the first arm, and   a vibration of the arm is suppressed based on an output from the second inertia sensor.   
     
     
         16 . The robot according to  claim 8 , comprising:
 a second inertia sensor that is installed between the second arm and a front end of the arm; wherein   the second arm is coupled to the first arm, and   a vibration of the arm is suppressed based on an output from the second inertia sensor.   
     
     
         17 . The robot according to  claim 16 , wherein:
 a vibration of the second arm is suppressed by a control of the second arm based on the output from the second inertia sensor.   
     
     
         18 . The robot according to  claim 1 , wherein
 the first inertia sensor is an angular velocity sensor.   
     
     
         19 . The robot according to  claim 17 , wherein:
 the first inertia sensor is an angular velocity sensor, and   the second inertia sensor is an angular velocity sensor.